基于电流体动力喷射的多层柔性电路垂直互联结构打印技术研究  

Printing of vertical interconnection structures for multilayer flexible circuits based on electrohydrodynamic jetting

作　　者：王丹阳 高振强 靳茂鹏 郭恒瑞 白彦军 王飞[1] 彭子龙[1] WANG Danyang;GAO Zhenqiang;JIN Maopeng;GUO Hengrui;BAI Yanjun;WANG Fei;PENG Zilong(Qingdao University of Technology,Qingdao 266000,China)

机构地区：[1]青岛理工大学,青岛266000

出　　处：《现代制造工程》2024年第11期37-44,共8页Modern Manufacturing Engineering

基　　金：山东省自然科学基金项目(2018GGX103050)。

摘　　要：柔性可拉伸电子器件在可穿戴电子产品和软体机器人等领域应用广泛。为了实现高度集成,不同层之间的电子器件需要通过垂直互联来连接在一起,因此,实现稳定的垂直互联至关重要。提出了一种可以通过电流体动力喷射直接打印低熔点液态金属立柱的方法,可以实现柔性电路的垂直互联。通过控制打印参数,可以打印出不同高度的金属立柱,以制作出不同高度的垂直互联。为了检测垂直互联结构的稳定性和可靠性,将制作的具有垂直互联通道的电路分别进行拉伸、弯曲检测,检测表明在数百次的弯曲和拉伸循环下,该电路具有稳定的电阻响应。制作了一个基于多层结构的带LED灯的无线感应线圈,以展示电流体动力喷射打印用于垂直互联的能力。Flexible stretchable electronics are widely used in fields such as wearable electronics and soft robots,etc.In order to achieve a high degree of integration,electronics between different layers,etc.,need to be connected together by vertical interconnections,and thus it is crucial to achieve stable vertical interconnections.A method that can directly print low-melting-point liquid metal columns by electrohydrodynamic jetting was proposed,which can realize vertical interconnections of flexible circuits.By controlling the printing parameters,different heights of metal risers can be printed to fabricate vertical intercon-nections of different heights.In order to test the stability and reliability of the vertical interconnection structure,the fabricated circuits with vertical interconnection channelsion were subjected to tensile and bending tests,respectively,which showed that the circuits had a stable resistance response under hundreds of bending and tensile cycles.A wireless induction coil with LED lights based on a multilayer structure was fabricated to demonstrate the capability of electro hydrodynamic jet printing for vertical interconnections.

关 键 词：垂直互联 多层柔性电路 电流体动力喷射打印 液态金属 

分 类 号：TP16[自动化与计算机技术—控制理论与控制工程]