离轴反射系统的像差失调量计算方法  

Method to solve assembly misalignment of Off-axis reverse system

作　　者：徐航 王青[1] 朱宏钰 XV Hang;WANG Qing;ZHU Hongyu(School of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210000,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学技术》2024年第6期655-660,共6页Optical Technique

摘　　要：基于矢量像差理论,推导了离轴反射系统的失调像差表达式,提出一种高效的离轴反射系统装调方法。通过分析发现失调离轴系统不会引入新形式的像差,只是由于光瞳缩放因子的原因,相较于同轴母系统,其几项初级像差会进行缩放,且高级孔径像差会部分转化为低阶孔径像差;利用Zemax软件对离轴双反系统进行仿真,验证了失调像差表达式,模拟装调的失调量达到了10^(-4)mm数量级。最后,利用该计算方法指导了实际Φ150mm口径离轴双反扩束系统的装调,各初级像差达到10^(-5)(λ=632.8nm)数量级,系统的RMS值达到0.04λ,验证了该像差失调量计算方法的准确性。The expression of misalignment aberration of off-axis reverse system is derived,and an efficient off-axis reverse system assembly and adjustment method is proposed,based on the vector aberration theory.Through the analysis,it is found that the off-axis system will not introduce new forms of aberration,but due to the aperture factor,compared with the coaxial system,several primary aberrations will be scaled,and the high order aperture aberration will be partially transformed into low order aperture aberration.The misalignment aberration expression is verified by the simulation of an off-axis-two-reverse system,using Zemax.The misalignment in the simulated alignment reaches the order of 10^(-4)mm.Finally,use the method to guide the assembly and adjustment of the actual off-axis-two-reverse system beam expansion system.The primary aberration reaches the order of 10^(-4)(λ=632.8nm),and the RMS value of the system reaches 0.04λ,which verifies the accuracy of the method.

关 键 词：矢量像差理论 计算机辅助装调 离轴反射光学系统 Zernike系数 

分 类 号：TH74[机械工程—光学工程]