基于连续小波变换的透明物体相位测量偏折条纹解耦方法  

Fringe decoupling method for phase deflection measurement of transparent objects based on continuous wavelet transform

作　　者：陈思儒 高楠[1] 郭彤[2] 张国锋[3] 王鹏程 倪育博 孟召宗 张宗华[1] CHEN Siru;GAO Nan;GUO Tong;ZHANG Guofeng;WANG Pengcheng;NI Yubo;MENG Zhaozong;ZHANG Zonghua(School of Mechanical Engineering,Hebei University of Technology,Tianjin 300130,China;State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China;School of Mechanical Engineering,Xian Jiaotong University,Shanxi 710049,China)

机构地区：[1]河北工业大学机械工程学院,天津300130 [2]天津大学精密测试技术及仪器全国重点实验室,天津300072 [3]西安交通大学机械工程学院,陕西西安710049

出　　处：《光学技术》2024年第6期721-729,736,共10页Optical Technique

基　　金：国家自然科学基金(U2341275);河北省自然科学基金(E2024202121)。

摘　　要：在利用相位测量偏折术(PMD)测量透明物体时,物体后表面存在寄生反射,从而产生相位误差。因此提出一种基于连续小波变换的透明物体相位测量偏折条纹解耦方法。首先提出一种基于模极大值与图像分割相结合的方法进行多脊线提取,然后提取脊线位置处的相位值,最后解算梯度数据并利用梯度积分恢复物体三维形貌。实验结果表明,这种方法测量50.800mm直径、曲率半径范围在135.800~515.090mm的不同透镜,曲率半径误差平均为0.038mm,面形误差的均方根平均为1.4μm。所提方法可以分离耦合条纹并有效地重建透明物体两个表面三维形貌,实现高精度测量。The phase measuring deflectometry fails to measure the double surfaces of transparent objects,because the fringes reflected from both the front and rear surfaces are superimposed in the captured images.Therefore,accurately extracting the phase from the coupled fringe patterns is considered as one of the main problems in PMD.A fringe decoupling method based on continuous wavelet transform is proposed to eliminate parasitic reflections.It proposes a method based on modular maximum and image segmentation,which extracts the best multi-region ridge points in time-frequency domain and obtain the principal components of different wavelet ridges in amplitude spectrum.Then the fringe phase of the corresponding position of the wavelet ridge is extracted.The proposed method successfully attains a curvature radius mean value of 0.038mm for 135.800~515.090mm radius of curvature lens in the experiment.The root mean square of the surface shape error is 1.4μm.The proposed algorithm can eliminate parasitic reflections successfully which eventually realizes high-precision measurement of transparent objects.

关 键 词：应用光学 寄生反射 相位测量偏折术 条纹解耦 小波变换 三维重建 

分 类 号：TH741[机械工程—光学工程]