基于图形衬底表面化学水浴法的硫化铅薄膜均匀性研究  

Study on Uniformity of Lead Sulfide Thin Films Based on Chemical Bath Deposition on Graphic Substrate Surface

作　　者：马睿 杨冬 冷重钱[2] 申钧[2] MA Rui;YANG Dong;LENG Chong-Qian;SHEN Jun(Chongqing University of Posts and Telecommunications,Chongqing 400700,China;Chongqing Institute of Green and Intelligent Technology,Chinese Academy of Sciences,Chongqing 400714,China)

机构地区：[1]重庆邮电大学,重庆400700 [2]中国科学院重庆绿色智能技术研究院,重庆400714

出　　处：《红外》2024年第11期17-27,共11页Infrared

摘　　要：硫化铅(PbS)等铅盐材料因较低的俄歇复合系数,是非制冷红外探测领域中备受关注的材料。化学水浴法被广泛用于硫化铅等薄膜的制备。然而该方法在图形化衬底上存在薄膜生长不均匀的问题。基于多次曝光显影技术,比较了不同预处理工艺对图形化衬底上薄膜生长均匀性的影响,在金属和绝缘衬底表面上均实现了硫化铅薄膜的均匀生长。基于优选预处理方法制备的硫化铅探测器的结果表明,图形衬底预处理可明显改善探测器在光电流、响应度和噪声等方面的性能,其中响应度可提升1.2倍。本文提供的硫化铅薄膜制备方法,不仅可在图形化衬底上生长均匀性一致的硫化铅薄膜,还可以修复受损衬底,有利于在读出电路表面实现硫化铅基焦平面阵列探测器的一体化加工。Lead salt materials such as lead sulfide have attracted much attention in the field of uncooled infrared detection because of their low auger recombination coefficient.Chemical bath deposition method is widely used in the preparation of lead sulfide and other films.However,this method has the problem of uneven film growth on the graphical substrate.Based on the multi-exposure development technology,the influence of different pretreatment processes on the growth uniformity of the film on the graphical substrate was compared.The uniform growth of the lead sulfide film on the metal and insulating substrate surface was achieved.The results of the lead sulfide detector prepared by the optimal pretreatment method show that the photocurrent,responsivity and noise of the detector are significantly improved by the pretreatment of the graphic substrate,and the responsivity can be increased by 1.2 times.The preparation method of lead sulfide film provided in this paper can not only grow lead sulfide film with consistent uniformity on the graphic substrate,but also repair the damaged substrate,which is conducive to the integrated processing of the lead-sulfide-based focal plane array detector on the readout circuit surface.

关 键 词：化学水浴法 硫化铅 生长均匀性 光电探测器 红外探测器 

分 类 号：TN362[电子电信—物理电子学]