Kovar合金的可控氧化及其与硼硅玻璃润湿性研究  

Controllable Oxidation of Kovar Alloy and Wetting Performance with Borosilicate Glass

作　　者：郭宏伟[1] 聂栋 王毅[1] 刘密 朱南沺 郭首一 高依博 赵志龙 GUO Hongwei;NIE Dong;WANG Yi;LIU Mi;ZHU Nantian;GUO Shouyi;GAO Yibo;ZHAO Zhilong(School of Materials Science and Engineering,Shaanxi University of Science and Technology,Xi'an 710021,China;Dongxu Group Co.,Ltd.,Beijing 100036,China)

机构地区：[1]陕西科技大学材料科学与工程学院,西安710021 [2]东旭集团有限公司,北京100036

出　　处：《硅酸盐通报》2024年第11期4215-4223,共9页Bulletin of the Chinese Ceramic Society

基　　金：国家重点研发计划(2017YFB0310201)。

摘　　要：本文在不同氧化气氛条件下对Kovar合金进行高温氧化处理,优化得到Kovar合金最佳氧化工艺,并与硼硅玻璃进行润湿试验和封接试验,同时运用XRD、XPS、SEM、EDS等分析手段对氧化成分和封接界面进行机理分析。结果表明,高温下Fe、Co、Ni元素均参与了氧化反应,Kovar合金氧化动力学遵循抛物线规律,Kovar合金的最佳氧化工艺为:氧化温度850℃、氧化时间11.7 min、N_(2)流量1 L/min、露点30℃。不同气氛氧化处理后,Kovar合金与玻璃封接的气密性变化较小,玻璃与表面氧化物为Fe_(3)O_(4)的Kovar合金封接后抗拉强度最大。In this paper,the high temperature oxidation treatment of Kovar alloy was carried out under different oxidation atmosphere conditions,and the optimum oxidation process of Kovar alloy was optimized.The wetting test and sealing test were carried out with borosilicate glass.At the same time,the oxidation composition and sealing interface were analyzed by XRD,XPS,SEM,EDS and other analytical methods.The results show that Fe,Co and Ni elements all participate in oxidation reaction at high temperature,and the oxidation dynamics of Kovar alloy follow the parabolic rule.The optimal oxidation process of Kovar alloy is:oxidation temperature 850℃,oxidation time 11.7 min,N_(2)flow 1 L/min,and dew point 30℃.After oxidation treatment in different atmospheres,the hermeticity of Kovar alloy and glass sealing changes little.The tensile strength of glass and Kovar alloy with surface oxide of Fe_(3)O_(4)is the highest after sealing.

关 键 词：Kovar合金 硼硅玻璃 玻璃封接 可控氧化 润湿性 气密性 

分 类 号：TQ171[化学工程—玻璃工业]