薄膜铌酸锂电光调制器研究进展  

Advances in thin-film lithium niobate electro-optic modulators

作　　者：范佳诺 李文健[1] 罗强 禹宣伊[1] 薄方[1] 张国权[1] 许京军[1] FAN JiaNuo;LI WenJian;LUO Qiang;YU XuanYi;BO Fang;ZHANG GuoQuan;XU JingJun(MOE Key Laboratory of Weak-Light Nonlinear Photonics,School of Physics,TE)

机构地区：[1]南开大学弱光非线性光子学教育部重点实验室,物理科学学院,泰达应用物理研究院,南开大学,天津300457

出　　处：《中国科学：物理学、力学、天文学》2024年第11期15-33,共19页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：天津市自然科学基金(编号:22JCYBJC01150)资助项目。

摘　　要：电光调制器被广泛应用于光通信系统的发射端,通过外加电信号改变光载波的振幅、相位等信息,实现高速电信号与光信号之间的转换.随着用户对数据流量和通信网络带宽需求的增加,对电光调制器的性能、集成度等指标提出了更高的要求.薄膜铌酸锂调制器具有功耗低、带宽大、尺寸小及制备技术相对成熟的特点,是集成光路未来发展的有效解决方案之一.本文综述了薄膜铌酸锂调制器的工作原理及设计思路,系统总结了调制器重要的性能指标,介绍了相位调制器、马赫-曾德尔型强度调制器等主流结构电光调制器的研究进展,并讨论了当前用于提升调制器性能的有效方案,最后对薄膜电光调制器存在的问题及未来发展进行了总结与展望.Electro-optic modulators are widely used in optical communication systems.It changes the amplitude,phase,and other information of the optical carrier by applying external electrical signals,thus realizing the conversion between highspeed electrical signals and optical signals.With the increasing demand for data traffic and communication network bandwidth,higher requirements are proposed for the performance and integration of electro-optic modulators.Thin-film lithium niobate modulators have low power consumption,large bandwidth,small size,and relatively mature preparation technology.These advantages make them become a practical solution for the future development of integrated optics.This paper reviews the working principle and design methods of thin-film lithium niobate electro-optic modulators,systematically summarizes the significant performance indicators of modulators,introduces the research progress of mainstream structural electro-optic modulators such as phase modulators and Mach-Zehnder intensity modulators,and discusses the currently effective solutions used to improve modulator performance.Finally,the problems and future development of thin-film electro-optic modulators are summarized and prospected.

关 键 词：铌酸锂 电光调制器 带宽 半波电压 集成光路 

分 类 号：TN929.1[电子电信—通信与信息系统]