基于均匀微突结构的高灵敏柔性电容压力传感器  

Highly sensitive capacitive flexible pressure sensor based on uniform micro-protrusion structure

作　　者：刘彩霞[1,2] 李帅 胡若海 陈恒 张玉刚 LIU Caixia;LI Shuai;HU Ruohai;CHEN Heng;ZHANG Yugang(School of Physics,Hefei University of Technology,Hefei 230601,China;School of Microelectronics,Hefei University of Technology,Hefei 230601,China)

机构地区：[1]合肥工业大学物理学院,安徽合肥230601 [2]合肥工业大学微电子学院,安徽合肥230601

出　　处：《合肥工业大学学报（自然科学版）》2024年第11期1448-1452,1471,共6页Journal of Hefei University of Technology：Natural Science

基　　金：浙江省“领雁”研发攻关计划资助项目(2022C03052);教育部产学合作协同育人资助项目(220604730212902)。

摘　　要：针对可穿戴医疗设备、电子皮肤、柔性触摸显示屏等对高灵敏柔性压力传感器的感知需求,文章基于纳米氧化锌(ZnO)、酞酸酯偶联剂(PN-105,PN)和室温硫化硅橡胶(room temperature vulcanized silicone rubber,RTV)材料,结合丝网印刷技术制备具有均匀微突阵列结构、ZnO-PN/RTV介电层的柔性电容式压力传感器,并对其传感机制和特性进行测试研究。结果表明:所研制的柔性电容式压力传感器具有高灵敏度(1.2 kPa^(-1))、快速响应(40 ms)、低检测限(2 Pa)、高使用寿命(>5000次)和良好的人体适用性;制备的5 cm×5 cm压力阵列能够满足可穿戴设备和柔性电子产品需求。该传感器灵敏度高且制作工艺简单、成本低,在柔性智能传感和服务机器人等领域具有良好的应用前景。Aiming at the sensing requirements of highly sensitive flexible pressure sensors for wearable medical devices,electronic skin,flexible touch screen,etc.,based on nano zinc oxide(ZnO),phthalic acid coupling agent(PN-105,PN)and room temperature vulcanized silicone rubber(RTV),combined with screen printing technology,this paper prepared a capacitive flexible pressure sensor with uniform micro-protrusion array structure and ZnO-PN/RTV dielectric layer,and tested its sensing mechanism and characteristics.The results show that the developed capacitive flexible pressure sensor has high sensitivity(1.2 kPa^(-1)),fast response(40 ms),low detection limit(2 Pa),high service life(>5000 times)and good human applicability.Prepared 5 cm×5 cm pressure array can meet the needs of wearable devices and flexible electronic products.The sensor has high sensitivity,simple manufacturing process and low cost,and has good application prospects in the fields of flexible intelligent sensors and service robots.

关 键 词：电容式柔性传感器 介电层 微突起结构 高灵敏 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]