基于狭缝整形的高重频皮秒激光玻璃斜角切割  

Silt Beam Shaping for Glass Bevel Cutting with A High-Frequency Picosecond Laser

作　　者：李倩靓 刘鸣 刘可欣 汪于涛 王丽 王金威 何宗泰 张骆 刘顿[1] Li Qianliang;Liu Ming;Liu Kexin;Wang Yutao;Wang Li;Wang Jinwei;He Zongtai;Zhang Luo;Liu Dun(School of Mechanical Engineering,Hubei University of Technology,Wuhan 430068,Hubei,China;Shanghai Key Laboratory of Laser Beam Micro Processing,Shanghai Institute of Laser Technology,Shanghai 200233,China)

机构地区：[1]湖北工业大学机械工程学院,湖北武汉430068 [2]上海市激光技术研究所有限公司、上海市激光束精细加工重点实验室,上海200233

出　　处：《应用激光》2024年第9期75-86,共12页Applied Laser

基　　金：省科技厅科研计划项目-重点研发计划(ZDZX2020000013)。

摘　　要：激光被广泛应用于潜望镜棱镜切割和手机屏幕倒角等诸多领域。采用狭缝整形技术,利用高重频皮秒激光在玻璃内部诱导改质区域以产生裂纹,且裂纹可精准沿斜角切割方向扩展,使用氢氟酸溶液腐蚀切割后的玻璃样品以辅助裂片。实现了裂片后玻璃断面粗糙度(Sa)为1.26μm,且断面与水平方向呈35°夹角的大斜角切割效果。研究了激光单脉冲能量、子脉冲数和扫描速度对石英玻璃切割后断面粗糙度及崩边的影响,优化了石英玻璃斜角切割的工艺方法。这种新的切割方法可以很好地解决棱镜玻璃斜角切割和裂片困难的问题,在透明材料激光加工领域也有较好的应用前景。Laser technology is widely employed for chamfering phone screens and engraving telescope prisms.This study explores the use of high repetition frequency picosecond lasers to induce fractures in modified glass through a slit shaping method.The study demonstrates that an oblique cutting orientation facilitates precise crack propagation.The results indicate that the glass piece is 1.26μm rough after separating and is sliced at a significant angle of 35°with the horizontal plane.In this study,the effects of laser pulse energy,pulse number,and scanning speed on the surface roughness and edge collapse of quartz glass are investigated.This novel cutting technique can resolve the issue of splitting and beveling prism glass,and it has a promising future in the area of laser processing translucent materials.

关 键 词：高重复频率 皮秒激光 改质区域 斜角切割 断面粗糙度 

分 类 号：TN249[电子电信—物理电子学]