多波段薄膜的波长误差补偿设计方法与应用  

Design Method and Application of Wavelength Error Compensation for Multi-band Films

作　　者：王松林[1] 张建付[1] 米高园[1] 阴万宏[1] 刘青龙[1] 赵红军[1] 张向明[1] WANG Song-lin;ZHANG Jian-fu;MI Gao-yuan;YIN Wan-hong;LIU Qing-long;ZHAO Hong-jun;ZHANG Xiang-ming(Xi'an Institute of Applied Optics,Xi'an 710065,China)

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《真空》2024年第6期7-14,共8页Vacuum

基　　金：军委装发部测试仪器项目(2019CS011)。

摘　　要：用于多光谱探测系统的多波段薄膜元件,其光学性能直接影响到系统的探测成像质量。为解决薄膜制备过程中多波段波长与理论设计光谱之间的偏差而造成的高性能多波段光学薄膜制备技术难题,提出了一种多波段光学薄膜的波长误差补偿设计方法。结合多光谱ZnS光学窗口上镀制5波段激光膜层的研究,利用波长误差补偿设计方法设计了膜系结构,采用真空蒸镀技术完成了膜层的制备,使用分光光度计和红外傅立叶光谱仪对实验结果进行测试。结果表明:镀膜后的多光谱ZnS光学窗口在5个工作波段的透射率曲线与理论分析结果高度一致,满足技术指标,验证了这种波长误差补偿设计方法的有效性。The optical properties of multi-band thin films elements used in multispectral detection systems directly affect the detection and imagine quality of the system.In order to solve the technical problems caused by the deviation between the multi-band wavelength and the theoretical design spectrum in the process of film preparation,a wavelength error compensation design method was proposed.Combined with the development of 5-band laser film coating on multispectral ZnS optical window,the structure of the film system was designed by using the wavelength error compensation design method,and the film was prepared by vacuum evaporation technology.The experimental results were tested by spectrophotometer and infrared Fourier spectrometer.The results show that the transmittance curves of the multispectral ZnS optical window at five working bands after coating are highly consistent with the theoretical ones,which meet the technical requirements and verify the effectiveness of the wavelength error compensation design method.

关 键 词：多光谱探测 薄膜制备 波长误差补偿 透射率 

分 类 号：TN305.8[电子电信—物理电子学] TB79[一般工业技术—真空技术] TN29