基于复合过渡层的DLC涂层残余热应力仿真分析  

Simulation analysis of residual thermal stress in DLC coatings based on composite transition layer

作　　者：黄珂 顾德华 邵思武 乔自平 李君安 陈良贤 刘金龙 李成明 魏俊俊 HUANG Ke;GU De-hua;SHAO Si-wu;QIAO Zi-ping;LI Jun-an;CHEN Liang-xian;LIU Jin-long;LI Cheng-ming;WEI Jun-jun(Institute for Advanced Materials and Technology,University of Science and Technology Beijing,Beijing 100083,China;No.208 Research Institute of China Ordnance Industries,Beijing 100083,China)

机构地区：[1]北京科技大学新材料技术研究院,北京100083 [2]中国兵器工业第208研究所,北京100083

出　　处：《材料热处理学报》2024年第11期224-233,共10页Transactions of Materials and Heat Treatment

摘　　要：利用ANSYS软件热固耦合模块对类金刚石(DLC)涂层的残余热应力进行有限元分析,模拟等离子体增强化学气相沉积(PECVD)制备DLC涂层从沉积温度150℃降温至22℃的过程,研究不同DLC厚度、过渡层(Cr、WC)结构及过渡层厚度对DLC涂层残余热应力的大小及应力分布的影响。结果表明:无论是DLC涂层厚度还是复合过渡层厚度的增大都有利于降低DLC涂层的热应力,但两者都具有临界最优值。较无过渡层的DLC涂层而言,过渡层WC、Cr层的单独存在都可降低DLC涂层的热应力,且WC层厚度变化的影响更明显。采用Cr/WC复合梯度过渡层结构设计,可进一步降低基底与DLC涂层之间的热膨胀系数过渡梯度,从而更有效地降低DLC涂层的热应力。Finite element analysis of residual thermal stress in diamond-like carbon(DLC)coatings was conducted using ANSYS software’s thermal-solid coupling module.The cooling process of plasma enhanced chemical vapor deposition(PECVD)preparation of the DLC coatings from deposition temperature of 150℃to 22℃was simulated.The effects of different DLC coatings thicknesses,transition layer(Cr,WC)structures and transition layer thicknesses on the value and stress distribution of residual thermal stress in the DLC coatings were studied.The results show that both increasing the thickness of DLC coatings and composite transition layers are beneficial for reducing the thermal stress of the DLC coatings,but both have critical optimal values.Compared with the DLC coatings without transition layers,the separate presence of WC or Cr transition layers can reduce the thermal stress of the DLC coatings,and the effect of WC layer thickness variation is more significant.The design of Cr/WC composite gradient transition layer structure can further reduce the thermal expansion coefficient transition gradient between the substrate and the DLC coatings,thereby more effectively reducing the thermal stress of the DLC coatings.

关 键 词：等离子体增强化学气相沉积(PECVD) 类金刚石(DLC) 复合过渡层 ANSYS 残余热应力 

分 类 号：TG174.44[金属学及工艺—金属表面处理]