A dual-range Janus-structure pressure sensor with broaddetection range and high resolution combiningtriboelectricity and piezoelectricity  

作　　者：Shilong Zhao Chaojie Chen Zhiyuan Wang Caofeng Pan Cheng Yang 

机构地区：[1]Institute of Materials Research,Tsinghua Shenzhen International Graduate School,Tsinghua University,Shenzhen,the People's Republic of China [2]Beijing Institute of Nanoenergy and Nanosystems,Chinese Academy of Sciences,CAS Center for Excellence in Nanoscience,Beijing Key Laboratory of Micro-nano Energy and Sensor,Beijing,the People's Republic of China [3]Department of Mechanical and Automation Engineering,The Chinese University of Hong Kong,Shatin,N.T.Hong Kong,the People's Republic of China.

出　　处：《InfoMat》2024年第10期80-95,共16页信息材料（英文）

基　　金：National Natural Science Foundation ofChina, Grant/Award Numbers:52061160482, 52273297;GuangdongProvincial Key Laboratory of ThermalManagement Engineering & Materials,Grant/Award Number: 2020B1212060015;Shenzhen Technical Project, Grant/AwardNumbers: GJHZ20210705143000002,KCXST20221021111401003;ShenzhenOutstanding Talents Training Fund;Shenzhen Geim Graphene Center。

摘　　要：Enabling pressure sensors with high resolution and a broad detection range isof paramount importance yet challenging due to the limitations of each knownsensing method. Overlying different sensing mechanisms to achieve complementaryfunctions is a promising approach, but it often leads to increaseddevice thickness, crosstalk signals and complex signal channel management.Herein, we present a dual-functional conformable pressure sensor that adoptsa Janus thin film layout, enabling simultaneous piezoelectric and triboelectricsignal detection capabilities between just one electrode pair, showing a mostcompact device configuration. Notably, despite its thin thickness (80 μm for apackaged device), it exhibits a broad-range detection capability with high signalresolution and fast response time, demonstrating a distinct signal-relaycharacteristic corresponding to piezoelectricity and triboelectricity. Despite theslimness and simple structure, it shows an impressive signal resolution of0.93 V·kPa^(-1) in the range of 0.1–140 kPa and 0.05 V·kPa^(-1) in the range of140–380 kPa. Moreover, the device fabrication can be combined with thekirigami method to improve fitting to joint surfaces. This work introduces aninnovative paradigm for designing advanced pressure sensing mechanisms,enabling a single device that can meet diverse application scenarios through itssimplicity, slim layout, conformable, and self-powered characteristics to adaptto multiple scenarios.

关 键 词：large detection range triboelectric and piezoelectric effect ultrathin pressure sensor 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]