Laser-processed lithium niobate wafer for pyroelectric sensor  

作　　者：Di Xin Jing Han Wei Song Wenbin Han Meng Wang Zhimeng Li Yunwu Zhang Yang Li Hong Liu Xiaoyan Liu Dehui Sun Weijia Zhou 

机构地区：[1]Institute for Advanced Interdisciplinary Research(iAIR),School of Chemistry and Chemical Engineering,University of Jinan,Jinan,People's Republic of China [2]School of Physics and Technology,University of Jinan,Jinan,People's Republic of China [3]CETC Deqing Huaying Electronics Co.,LTD.,HuZhou,People's Republic of China [4]School of Microelectronics,Shandong University,Jinan,People's Republic of China [5]State Key Laboratory of Crystal Materials,Shandong University,Jinan,Shandong Province,People's Republic of China

出　　处：《InfoMat》2024年第10期108-118,共11页信息材料（英文）

基　　金：National Key Research and Development Program of China,Grant/Award Number:2023YFB3210400;National Natural Science Foundation of China,Grant/Award Number:52102171;Major Scientific and Technological Innovation Project of Shandong Province,Grant/Award Numbers:2021CXGC010603,2023CXGC010110;Natural Science Foundation of Shandong Province,Grant/Award Numbers:ZR2021ZD20,ZR2020LLZ006,ZR2021JQ15,ZR2023LLZ008;Innovative Team Project of Jinan,Grant/Award Number:2021GXRC019。

摘　　要：During the past few decades, pyroelectric sensors have attracted extensiveattention due to their prominent features. However, their effectiveness is hinderedby low electric output. In this study, the laser processed lithium niobate(LPLN) wafers are fabricated to improve the temperature–voltage response.These processed wafers are utilized to construct pyroelectric sensors as well ashuman–machine interfaces. The laser induces escape of oxygen and the formationof oxygen vacancies, which enhance the charge transport capability on thesurface of lithium niobate (LN). Therefore, the electrodes gather an increasedquantity of charges, increasing the pyroelectric voltage on the LPLN wafers toa 1.3 times higher voltage than that of LN wafers. For the human–machineinterfaces, tactile information in various modes can be recognized by a sensorarray and the temperature warning system operates well. Therefore, the lasermodification approach is promising to enhance the performance of pyroelectricdevices for applications in human–machine interfaces.

关 键 词：human–machine interfaces laser-induced defects lithium niobate pyroelectric sensors surface modification 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]