轴对准测试系统光机热集成分析  

Thermal Integration Analysis of Optical Machines for Axis Alignment Test Systems

作　　者：陈媛 王劲松[1,2] 王浩 张云川 CHEN Yuan;WANG Jinsong;WANG Hao;ZHANG Yunchuan(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;Zhongshan Institute of Changchun University of Science and Technology,Zhongshan 528437,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学中山研究院,广东中山528437

出　　处：《红外技术》2024年第11期1235-1244,共10页Infrared Technology

基　　金：吉林省重点科技研发项目(20180201025GX)。

摘　　要：轴对准测试系统是一种应用大口径平行光管法来测量光轴平行性的重要仪器,系统焦距为4800mm,口径为600mm。在测试过程中,由于焦距长、口径大,环境温度的变化引起的各元件的微小变形都会影响系统的成像质量及测试精度。因此,需要对该系统进行光机热集成分析。建立了轴对准测试系统的有限元分析模型,分析了稳态温度场、温度梯度场下系统的热变形,利用Zernike多项式对热变形后的镜面进行面型拟合,将拟合系数导入光学设计软件,得到不同温度变化下对轴对准测试系统的影响,通过实验验证了仿真结果的准确性。结果表明:稳态温度场下,在设计参数要求的温度范围内,光学系统波像差均小于λ/10(λ=632.8 nm),光轴平行性检测精度满足0.02 mrad;温度梯度场对系统影响更大,需将系统内外温差控制在±3℃内。The axis alignment test system is an important instrument for measuring the parallelism of optical axes by applying the method of large aperture parallel light tubes,with a focal length of 4800 mm and an aperture of 600 mm.During the test process,due to the long focal length and large aperture,the small deformation of each component caused by the change of the ambient temperature will affect the imaging quality of the system and the test accuracy.Therefore,an opto-mechanical thermal integration analysis of the system is required.The finite element analysis model of the shaft alignment test system was established,the thermal deformation of the system under steady state temperature field and temperature gradient field was analyzed,the Zernike polynomials were used to fit the surface shape of the mirror after thermal deformation,and the fitting coefficients were imported into the optical design software to get the effects on the shaft alignment test system under different temperature changes,and the accuracy of the simulation results was verified by experiments.The results show that:under the steady state temperature field,within the temperature range required by the design parameters,the wave aberration of the optical system is less than λ/10(λ=632.8 nm),and the accuracy of the optical axis consistency detection meets 0.02mrad;the temperature gradient field has a greater impact on the system,and it is necessary to control the temperature difference between the inside and the outside of the system to within±3℃.

关 键 词：轴对准测试系统 光机热集成分析 有限元分析 ZERNIKE多项式 面型精度 

分 类 号：TH74[机械工程—光学工程]