XPS数据用于计算薄膜厚度时的处理方法  

Methods of Processing XPS Data for Calculating Film Thickness

作　　者：刘涵 陈萌[1] LIU Han;CHEN Meng(Department of Materials Science,Fudan University,Shanghai 200433,China)

机构地区：[1]复旦大学材料科学系,上海200433

出　　处：《光谱学与光谱分析》2024年第12期3301-3305,共5页Spectroscopy and Spectral Analysis

基　　金：国家重点研发计划项目(2017YFA0207301);国家自然科学基金项目(21890751)资助。

摘　　要：X射线光电子能谱(XPS)技术能够提供样品表面各化学状态的元素的峰位、峰强等信息。通过这些信息以及光电子信号表达式,可以计算出薄膜厚度。介绍了三种光电子信号表达式的处理方法:直接求解法,基底-比值法和角度-比值法;分析了其推导过程。研究结果表明三种处理方式具有不同的精确度和适用范围。直接求解法没有适用限制,但精确度低;基底-比值法适用范围较小,仅适用于计算厚基底上的薄膜厚度,要求薄膜和基底组成成分具有相近的有效衰减长度λ,而这种方法受到仪器项和碳污染项误差的影响最小,具有最高的计算精确度;角度-比值法的适用范围和计算精确度适中,无需考虑基底层的限制条件,但出射角θ的变化幅度对计算精确度有较大影响。因此在使用XPS数据计算薄膜厚度时,研究者可以综合考虑上述各因素。The X-ray Photoelectron Spectroscopy(XPS)tech nique can provide information about the chemical states of various elements on t he sample surface and the peak intensities and positions of their spectra.The t hickness of thin films can be calculated by utilizing this information and the e quation for photoelectron signals.This paper introduces three methods for handl ing the equation of photoelectron signals:direct solving method,substrate-rat io method,and angle-ratio method.Their derivation processes are analyzed,and the results indicate that these three methods have different accuracies and app licability ranges.The direct-solving method has the widest applicability but t he lowest accuracy.The substrate-ratio method has the most limited applicabili ty range,being able to calculate the thickness of thin films only on substrates of infinite thickness,and the effective attenuation lengthλof the compo sition of film and substrate composition needs to be similar.However,it is leas t affected by instrumental and carbon contamination errors,thus having the high est calculation accuracy.The angle-ratio method has a moderate applicability r ange and calculation accuracy,and it can be used without considering the limita tion of the substrate layer.However,the variation in the emission angleθsignificantly affects the calculation accuracy.Researchers can consider the ab ove factors comprehensively when calculating the thickness of thin films using X PS data.

关 键 词：X射线光电子能谱(XPS) 角分辨X射线光电子能谱(ARXPS) 薄膜厚度 

分 类 号：O484.5[理学—固体物理]