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作 者:Ziwei Yuan Meng Xie Jianlei Qian Wenjie Fan Menglu Li Liao Guo Yan Sun Wenxin Fu
机构地区:[1]Key Laboratory of Science and Technology on High-Tech Polymer Materials,Institute of Chemistry,Chinese Academy of Sciences,Beijing,China [2]University of Chinese Academy of Sciences,Beijing,China [3]Key Laboratory for Special Functional Materials of Ministry of Education,National&Local Joint Engineering Research Center for High-Efficiency Display and Lighting Technology,School of Materials Science and Engineering,Collaborative Innovation Center of Nano Functional Materials and Applications,Henan University,Kaifeng,China
出 处:《Aggregate》2024年第3期239-247,共9页聚集体(英文)
基 金:National Natural Science Foundation of China,Grant/Award Numbers:52373316,22075298;Beijing Municipal Natural Science Foundation,Grant/Award Number:2212053。
摘 要:The high curing temperatures required for traditional benzocyclobutene(BCB)materials have posed limitations on their applicability in high-temperature-sensitivefields.To address this challenge,our work focuses on the synthesis of a novel tetraphenylethylene(TPE)-functionalized BCB monomer,TPE–BCB,achieved through the introduction of an ether bond onto the BCB’s four-membered ring via Williamson reaction.TPE–BCB demonstrates remarkable low-temperature curing properties,characterized by a ring-opening peak temperature of 190◦C,representing a reduction of 60◦C compared to conventional BCBs.Fully cured TPE–BCB resins exhibit exceptional dielectric and mechanical properties,coupled with minimal water absorption.Additionally,the incorporation of TPE with aggregation-induced emission characteristics enhances the resins’luminescence and photolithographic capabilities.Notably,our TPE–BCB resins achieve impressive photolithography performance with a resolution ratio of up to 10μm.In contrast to conventional BCB-functionalized resins,TPE–BCB offers the dual advantage of low-temperature curing and luminescence.This development marks a significant step in the advance-ment of low-temperature curing BCB materials and serves as a pioneering example in the realm of multilayer wafer bonding materials.
关 键 词:aggregation-induced emission BENZOCYCLOBUTENE low-temperature curing wafer bonding Williamson reactions
分 类 号:TQ32[化学工程—合成树脂塑料工业]
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