双频磁场分时激励的新型单列绝对式直线时栅位移传感器  

A novel single-row absolute displacement sensor featuring dual-frequency magnetic field time-sharing excitation and linear time-grating displacement measurement

作　　者：杨继森[1,2,3] 修府 张静 文杰 刘嘉诚 Yang Jisen;Xiu Fu;Zhang Jing;Wen Jie;Liu Jiacheng(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Key Laboratory of Advanced Manufacturing Technology for Automobile Parts,Ministry of Education,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing 400054,China;School of Electrical and Electronic Engineering,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]重庆理工大学汽车零部件先进制造技术教育部重点实验室,重庆400054 [3]重庆理工大学时栅传感及先进检测技术重庆市重点实验室,重庆400054 [4]重庆理工大学电气与电子工程学院,重庆400054

出　　处：《仪器仪表学报》2024年第9期308-322,共15页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金项目(52175454);重庆市自然科学基金面上项目(CSTB2023NSCQ-MSX0382);重庆市教委科学技术研究计划重点项目(KJZD-K202301106);重庆市研究生科研创新项目(CYS240668)资助。

摘　　要：针对小体积安装、高精度直线位移测量需求,基于双频磁场分时激励方案和外差降频原理,设计了一种新型单列绝对式直线时栅位移传感器结构,解决提高传感器激励信号频率来获得高信噪比与高分辨力之间的矛盾。首先,建立平面线圈瞬态磁场耦合模型,构建单列绝对式直线时栅测量模型及其传感机理,其对极数互质绝对位置解算方案避免实际使用中测量误差对解算结果的影响;通过电磁场仿真对比分析了不同形状感应线圈与气隙磁场之间的耦合特性,确定了传感器优化安装间隙为0.6 mm;采用500 kHz、1 MHz不同频率分时激励驱动方案,并提出一种外差降频的解耦新方法,保证传感器高分辨力的前提下,提高了传感器的信噪比;最后,制作传感器样机并进行性能测试。实验结果表明,采用外差降频解耦新方法相对于原直接解耦法在一个“精机”对极周期内的测量精度提高了36.4%,传感器在187.68 mm有效测量范围内,经误差补偿后的精度为±4.9μm,分辨力为0.14μm。该时栅位移传感器与国外主流产品相比,降低了对超精密栅线的刻画和电子细分技术的依赖,具有高精度、高分辨力、体积小、成本低的特点。To address the need for compact installation and high-precision linear displacement measurement,a novel single-row absolute linear time-grating displacement sensor structure is designed using a dual-frequency magnetic field time-sharing excitation scheme and outlier frequency reduction principle.This design resolves the conflict between increasing the frequency of sensor excitation signals for a higher signal-to-noise ratio and achieving high resolution.First,a transient magnetic field coupling model for a planar coil is established to create a single absolute linear time-grating measurement model and its sensing mechanism.The proposed solution for absolute position determination minimizes measurement error influence.Electromagnetic field simulations are used to analyze the coupling characteristics of various induction coil shapes and air gap magnetic fields,leading to an optimized sensor installation gap of 0.6 mm.The sensor employs 500 kHz and 1 MHz time-sharing excitation drive schemes and introduces a novel decoupling method for outlier frequency reduction,which ensures high resolution while enhancing the signal-to-noise ratio.The sensor prototype was fabricated and tested,with experimental results demonstrating a 36.4%increase in measurement accuracy using the outlier frequency reduction method compared to the original direct decoupling method.The sensor provides an effective measurement range of 187.68 mm,with an accuracy of±4.9μm and a resolution of 0.14μm after error compensation.Compared to mainstream international products,this time-grating displacement sensor offers high accuracy,high resolution,compact size,and low cost while reducing reliance on ultra-precise grating etching and electronic subdivision technologies.

关 键 词：双频磁场 单列绝对式 对极数互质 外差降频 直线时栅位移传感器 

分 类 号：TH712[机械工程—测试计量技术及仪器]