Structure,electric,and dielectric properties of(Sr_(0.7)Ca_(0.3))_(1.02)(Zr_(0.95−x)Ti_(0.05)Mn_(x))O_(3+δ)ceramics for BME-MLCCs application  

作　　者：Qingyang Pang Ying Chen Zhixiang Wang Bin Zhou Xin Li Chao Mu Guangping Gu Genshui Wang 

机构地区：[1]Key Laboratory of Inorganic Functional Materials and Devices,Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 201800,China [2]University of Chinese Academy of Sciences,Beijing 100049,China [3]National Key Laboratory of Materials for Integrated Circuits,Shanghai Institute of Micro-system and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China [4]Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China [5]School of Chemistry and Materials Science,Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China [6]China Zhenhua Xinyun Electronic Components Co.,Ltd.,Guiyang 550018,China

出　　处：《Journal of Advanced Ceramics》2024年第9期1382-1393,共12页先进陶瓷（英文）

基　　金：supported by the Chinese Academy of SciencesKey Project(No.ZDRW-CN-2021-3-1-18);the NationalNatural Science Foundation of China(No.U2002217).

摘　　要：Zirconate-based dielectric ceramics are potential materials for base metal electrode multilayer ceramic capacitors(BME-MLCCs)due to their exceptional chemical and thermal stability,as well as excellent dielectric properties.In this work,(Sr_(0.7)Ca_(0.3))1.02(Zr_(0.95−x)Ti_(0.05)Mn_(x))O_(3)+δ(SCZTM,0≤x≤0.05)ceramics with two coexisting phases were prepared using a solidstate reaction method in a reducing atmosphere.This study investigates the impact of Mn doping on sintering temperature,microstructure,and electrical properties of SCZTM ceramics.Mn doping can reduce the sintering temperature from 1450 to 1300℃.The impact of Mn doping on the structure and phonon vibration is minimal,resulting in a negligible effect on the intrinsic loss.The valence states of Mn ions and defects were characterized by X-ray photoelectron spectroscopy(XPS)and thermally stimulated depolarization current(TSDC)analysis.The results demonstrate the significant role of Mn doping in nonintrinsic loss.Due to the decrease in the concentration of oxygen vacancies(V_(O)),SCZTM(x=0.01)ceramics exhibit attractive properties:resistivity(ρ)=8.93×10^(14)Ω·cm,dielectric constant(ε_(r))=36.16,dielectric loss(tanδ)=2.43×10^(–4),temperature dependence of dielectric constant(τ_(ε))=15.44 ppm/℃(@−55–200℃,1 MHz),Q×f=30,257 GHz(@6.12 GHz),and temperature coefficient of resonant frequency(τf)=–9.9 ppm/℃.SCZTM(x=0.01)ceramic powders were used to successfully fabricate Ni-based multilayer ceramic capacitors(MLCCs)with a high insulation resistance of IR≥39.6 TΩ,an ultralow dielectric loss of tanδ=0.2×10^(–4),and a wide operating temperature range(temperature coefficient of capacitance(T_(cc))=10.88 ppm/℃,@−55–200℃,1 MHz).SCZTM ceramics exhibit properties that make them suitable for use as BMEMLCC materials with potential market applications.

关 键 词：dielectric properties reducing atmosphere DEFECTS multilayer structure 

分 类 号：TQ137.12[化学工程—无机化工]