Design and fabrication of metal spherical conformal thin film multisensor for high-temperature environment  

作　　者：Lida XU Xiong ZHOU Yong HUANG Yusen WANG Chenhe SHAO Yuelong LI Lingyun WANG Qingtao YANG Daoheng SUN Qinnan CHEN 

机构地区：[1]Discipline of Intelligent Instrument and Equipment,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen University,Xiamen 361102,China [2]Fujian Micro/nano Manufacturing Engineering Technology Research Center,Xiamen University,Xiamen 361102,China [3]China Aerodynamics Research and Development Center,Mianyang 621000,China

出　　处：《Chinese Journal of Aeronautics》2024年第11期535-547,共13页中国航空学报（英文版）

基　　金：supported by the National Key Research and Development Program of China(No.2022YFB3203900)。

摘　　要：Conformal thin-film sensors enable precise monitoring of the operating conditions of components in extreme environments.However,the development of these sensors encounters major challenges,especially in uniformly applying multiple film layers on complex metallic surfaces and accurately capturing diverse operational parameters.This work reports a multi-sensor design and multi-layer additive manufacturing process targeting spherical metallic substrates.The proposed high-temperature dip-coating and self-leveling fabrication process achieves high-temperature thin-film coatings with excellent uniformity,high-temperature electrical insulation,and adhesion properties.The fabricated Ag/Pt thin film thermocouple arrays and a heat flux sensor exhibit a maximum temperature resistance of up to 960℃,with thermoelectric potential outputs and hightemperature resistance closely mirroring those of wire-based Ag/Pt thermocouples.Harsh environmental testing was conducted using high-power lasers and a flame gun.The results show that the array of thin-film conformal thermocouples more accurately reflected temperature changes at different points on a spherical surface.The heat flux sensors achieve responses within 95 ms and with-stand environments with heat fluxes over 1.2 MW/m^(2).The proposed multi-sensor design and fabrication method offers promising monitoring applications in harsh environments,including aerospace and nuclear power.

关 键 词：Conformal thin-film sensor Metallic spherical surfaces Multi-sensor perception Harsh environments Additive manufacturing 

分 类 号：TB383.2[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]