集成电路制造工业大气环境影响评价分析  

Analysis of Atmospheric Environmental Impact Assessment in Integrated Circuit Manufacturing Industry

作　　者：李观艳 LI Guanyan(Guangzhou Xunfeng Environmental Protection Technology Co.,Ltd.,Guangzhou 510030,China)

机构地区：[1]广州浔峰环保科技有限公司,广州510030

出　　处：《中国资源综合利用》2024年第11期140-142,共3页China Resources Comprehensive Utilization

摘　　要：近年来,我国集成电路产业迅速发展,企业逐步在产业园形成规模化聚集。然而,其制造过程涉及诸多种类的化学品,产生多种有毒有害气体,对区域环境产生显著影响。因此,做好大气环境影响评价是确保项目建设环保可行性的重要依据。从工艺废气产生、废气排放标准和废气治理措施等方面对其大气环境影响评价进行详细阐述,并探讨行业环评应关注的主要问题,为环境影响评价从业人员提供参考。In recent years,China’s integrated circuit industry has developed rapidly,and enterprises have gradually formed large-scale clusters in industrial parks.However,its manufacturing process involves various types of chemicals and produces a variety of toxic and harmful gases,which have a significant impact on the regional environment.Therefore,conducting a good atmospheric environmental impact assessment is an important basis for ensuring the environmental feasibility of project construction.The atmospheric environmental impact assessment is elaborated from the aspects of process waste gas generation,waste gas emission standards,and waste gas treatment measures,and the main issues are explored that industry environmental impact assessments should pay attention to,thus providing reference for environmental impact assessment practitioners.

关 键 词：集成电路制造工业 工艺废气 大气 环境影响评价 

分 类 号：TN405[电子电信—微电子学与固体电子学] X820.3[环境科学与工程—环境工程]