Secondary electron yield of air-exposed ALD-Al_(2)O_(3) coating on Ag-plated aluminum alloy  

作　　者：Xue-Man Wan Tian-Cun Hu Jing Yang Na Zhang Yun He Wan-Zhao Cui 万雪曼;胡天存;杨晶;张娜;何鋆;崔万照(National Key Laboratory of Science and Technology on Space Microwave,China Academy of Space Technology (Xi'an),Xi'an 710100,China)

机构地区：[1]National Key Laboratory of Science and Technology on Space Microwave,China Academy of Space Technology (Xi'an),Xi'an 710100,China

出　　处：《Chinese Physics B》2024年第11期265-271,共7页中国物理B（英文版）

基　　金：Project supported by the Sustainedly Supported Foundation by National Key Laboratory of Science and Technology on Space Microwave(Grant No.HTKJ2023KL504001);the National Natural Science Foundation of China(Grant No.62101434).

摘　　要：Secondary electron yield(SEY)of air-exposed metals tends to be increased because of air-formed oxide,hydrocarbon,and other contaminants.This enhances the possibility of secondary electron multipacting in high-power microwave systems,resulting in undesirable occurrence of discharge damage.Al_(2)O_(3) coatings have been utilized as passive and protective layers on device packages to provide good environmental stability.We employed atomic layer deposition(ALD)to produce a series of uniform Al_(2)O_(3) coatings with appropriate thickness on Ag-plated aluminum alloy.The secondary electron emission characteristics and their variations during air exposure were observed.The escape depth of secondary electron needs to exceed the coating thickness to some extent in order to demonstrate SEY of metallic substrates.Based on experimental and calculated results,the maximum SEY of Ag-plated aluminum alloy had been maintained at 2.45 over 90 days of exposure without obvious degradation by applying 1 nm Al_(2)O_(3) coatings.In comparison,the peak SEY of untreated Ag-plated aluminum alloy grew from an initial 2.33 to 2.53,exceeding that of the 1 nm Al_(2)O_(3) sample.The ultra-thin ALDAl_(2)O_(3) coating substantially enhanced the SEY stability of metal materials,with good implications for the environmental dependability of spacecraft microwave components.

关 键 词：secondary electron yield(SEY) atomic layer deposition air exposure MULTIPACTOR 

分 类 号：O462.2[理学—电子物理学] TG174.4[理学—物理]