硅微轴对称陀螺全角模式下的模态匹配优化技术  

Mode Matching Optimization Technique for Silicon-Micro Axisymmetric Gyroscopes in Rate-Integrating Mode

作　　者：黄海滨 胡远 陈东傲 陆铭洋 徐大诚[1] HUANG Haibin;HU Yuan;CHEN Dongao;LU Mingyang;XU Dacheng(School of Electronic Information,Soochow University,Suzhou Jiangsu 215006,China)

机构地区：[1]苏州大学电子信息学院,江苏苏州215006

出　　处：《传感技术学报》2024年第11期1879-1884,共6页Chinese Journal of Sensors and Actuators

基　　金：国家重点研发计划课题项目(2022YFB3205004)。

摘　　要：硅微轴对称陀螺全角模式下频率裂解会产生较大阈值,通过模态匹配的优化可以减小频率裂解。通过分析全角模式振型进动特点和刚度轴偏差原因,提出了一种高精度模态匹配技术。通过对陀螺进动状态时频率波动信息的分析,解调出其幅值和相位信息作为参考量,调整调谐电压以及调轴电压,从而实现模态匹配。实验结果表明,所提方法相较于传统开环模态匹配方法,频差从0.27 Hz提升至0.1 Hz以内,阈值从8°/s提升至3°/s,在相同360°/s转速下,输出角速率误差由18°/s降低至10°/s。Frequency cracking of silicon-micro axisymmetric gyroscopes in rate-integrating mode produces a larger threshold,which can be reduced by optimizing mode matching.A high precision mode matching technique is presented by analyzing the precession characteristics of rate-integrating mode and the causes of stiffness axis deviation.By analyzing the frequency fluctuation information during gyroscope precession,the amplitude and phase information are demodulated as reference,and the tuning voltage and axis voltage are changed to achieve mode matching.The experimental results show that,compared with the traditional open-loop mode matching method,the frequency difference is improved from 0.27 Hz to less than 0.1 Hz,the threshold is improved from 8°/s to 3°/s,and the output angular rate error is reduced from 18°/s to 10°/s at the same speed of 360°/s.

关 键 词：硅微轴对称陀螺 全角模式 模态匹配 阈值 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]