NiCr薄膜换能组件静电放电响应分析与防护  

Electrostatic Discharge Response Analysis and Protection of NiCr Thin Film Energy Conversion Components

作　　者：李博[1] 章云[1] 吴炳楷 解瑞珍[2] 姚洪志[2] LI Bo;ZHANG Yun;WU Bingkai;XIE Ruizhen;YAO Hongzhi(State Key Laboratory of Electromechanical Integrated Manufacturing of High-performance Electronic Equipment,Xidian University,Xi'an 710071,China;State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics-chemistry Research Institute,Xi'an 710061,China)

机构地区：[1]西安电子科技大学高性能电子装备机电集成制造全国重点实验室,西安710071 [2]陕西应用物理化学研究所瞬态化学效应与控制全国重点实验室,西安710061

出　　处：《装备环境工程》2024年第11期10-18,共9页Equipment Environmental Engineering

基　　金：陕西省重点研发计划项目(2023-YBGY-333);陕西省创新能力支撑计划(2023-CX-PT-30)。

摘　　要：目的 针对NiCr薄膜换能组件易受到人体静电干扰的问题,提出一种分析其静电放电响应特性的方法,并设计一种基于瞬态电压抑制(TVS)二极管的静电防护方案,提高其抗静电干扰的能力。方法 基于理论分析和COMSOL多物理场仿真软件,构建NiCr薄膜换能组件的静电放电模型,研究其在人体静电环境下的响应特性,并设计TVS二极管作为防护措施。结果 通过研究NiCr薄膜换能组件的静电响应特性,得到了其桥区温度及温度分布。结果显示,采用TVS二极管的静电防护设计能显著降低静电干扰,并表现出优异的防护效果。结论 在人体静电放电环境下,NiCr薄膜换能组件的桥区长度对温度无显著影响,但桥区温度随宽度和厚度的增加而降低。仿真和实验结果的峰值电流误差在2.5%以内,且峰值电流降低了40%,验证了TVS二极管在静电防护中的有效性,有助于提升NiCr薄膜换能组件的可靠性与安全性。Aiming at the problem that NiCr thin film transducer assembly is susceptible to human body electrostatic inter-ference,the work aims to propose a method for analyzing its electrostatic discharge response characteristics,and design an elec-trostatic protection scheme based on transient voltage suppression(TVS)diode to improve its anti-static interference ability.Based on theoretical analysis and COMSOL multi-physics simulation software,an electrostatic discharge model of NiCr thin film transducer assembly was constructed,and its response characteristics in human body electrostatic environment were stud-ied,and the TVS diode was designed as a protective measure.By studying the electrostatic response characteristics of NiCr thin film energy conversion components,the temperature and temperature distribution of the bridge area were obtained.The results showed that the electrostatic protection design using TVS diodes could significantly reduce electrostatic interference and showed excellent protection effect.In the human body electrostatic discharge environment,the bridge length of the NiCr film transducer assembly has no significant effect on the temperature,but the bridge area temperature decreases with the increase of width and thickness.The peak current error of simulation and experimental results is within 2.5%,and the peak current is re-duced by 40%,which verifies the effectiveness of TVS diodes in electrostatic protection and helps to improve the reliability and safety of NiCr thin film energy conversion components.

关 键 词：NiCr薄膜换能组件 静电放电 静电防护 静电响应 COMSOL TVS 

分 类 号：TJ450.2[兵器科学与技术—火炮、自动武器与弹药工程]