侧倾法及Rietveld辅助掠射法表征PVD涂层残余应力  

Characterization of Residual Stresses in PVD Coatings with Side-incline Method and Rietveld Assisted Glancing Method

作　　者：江嘉鹭 赵晓晓 王海燕 张晓丹 刘超 许荣杰 庄丽敏 林亮亮 Jiang Jialu;Zhao Xiaoxiao;Wang Haiyan;Zhang Xiaodan;Liu Chao;Xu Rongjie;Zhuang Limin;Lin Liangliang

机构地区：[1]国家钨材料工程技术研究中心厦门钨业股份有限公司技术中心,福建省厦门市361009 [2]厦门市硬质合金重点实验室 [3]厦门金鹭特种合金有限公司

出　　处：《工具技术》2024年第11期3-10,共8页Tool Engineering

基　　金：厦门市重大科技计划(3502Z20231009)。

摘　　要：X射线衍射法测定涂层应力在实际应用中仍存在如测试方式及参数选择、结果准确度判定等问题,而复合多层涂层则更复杂。采用侧倾法及Rietveld辅助掠射法表征硬质合金基PVD涂层残余应力,结合三者特点在适用范围内建立标准测试流程,并进行准确性验证试验。结果表明,该方法有较高的可靠性,有利于工业生产中涂层应力的快速判定。通过对比侧倾法测得的σAVE和Rietveld掠射法测得的σACDR,可较好地表征涂层各相所受应力及应力变化趋势,解决了采用单一测量方式难以判定准确性的问题。而合理运用Rietveld法可以解决多层涂层应力测试中无法避免的第二相干扰。There are still many difficulties in determining stress of coating using X-ray diffraction method in practical applications,such as the selection of testing mode and parameters,and the determination of result accuracy.For composite multilayer coatings,the problem will be even more complex.In this experiment,the side-incline method and Rietveld assisted glancing method is used to characterize the residual stresses of cemented carbide based PVD coatings.Using their respective characteristics,a standard test flow is established within the applicable scope,and an accuracy verification test is conducted.The test results of a series of process test samples also indicate that this method has high reliability,and is conducive to rapid determination of coating stress in industrial production.The comparison between theσAVE measured by the side-incline method and theσACDR measured by the Rietveld assisted glancing method can better characterize the stress and stress variation trends of each phase in the coating,solving the problem of difficulty in determining accuracy using a singletestingmode.Reasonable use of Rietveld method can solve the unavoidable second phase interference in stress testing of multi-layer coatings.

关 键 词：残余应力 X射线衍射 涂层 全谱拟合 侧倾法 掠射法 

分 类 号：TG115.22[金属学及工艺—物理冶金] TH123.4[金属学及工艺—金属学]