飞秒激光系统相位延迟反射镜的研制  

Development of phase delay mirrors for femtosecond laser systems

作　　者：牛鸿琨 张静[1] 付秀华[1,2] 马国水 金海俊 杨飞[4] NIU Hong-kun;ZHANG Jing;FU Xiu-hua;MA Guo-shui;JIN Hai-jun;YANG Fei(School of Opto-electronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;School of Opto-electronic Engineering,Zhongshan Institute of Changchun University of Science and Technology,Zhongshan 528437,China;OPTORUN(Shanghai)Co.,Ltd.,Shanghai 200444,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学中山研究院光电工程学院,广东中山528437 [3]光驰科技(上海)有限公司,上海200444 [4]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《中国光学（中英文）》2024年第6期1442-1449,共8页Chinese Optics

基　　金：吉林省科技发展计划项目资助(No.20230101008JC);中国科学院青年创新促进会优秀会员(No.Y202053);中国科学院国际伙伴计划(No.181722KYSB20200001);国家自然科学基金(No.11973040);中山市精密光学薄膜创新科研团队项目(No.CXTD2023008)。

摘　　要：为了对飞秒激光系统的群延迟色散(group-delay dispersion,GDD)进行调控,设计并制备了相位延迟反射镜。本文系统地研究了相位延迟反射镜补偿群延迟色散原理,使用Nb2O5和SiO2作为高低折射率材料,并采用将相位延迟反射镜与其互补镜配对的方式平缓了群延迟色散曲线,制备出了相位调控数据为-800 fs2的相位延迟反射镜。该反射镜在900~1100 nm范围内的反射率达到99%以上,解决了飞秒激光系统带宽调节的问题,满足飞秒激光器的使用要求。Phase delay mirrors were designed and prepared to regulate femtosecond laser systems’groupdelay dispersion(GDD).This paper systematically investigates the principle of compensating group-delay dispersion by phase-delay mirrors.Nb2O5 and SiO2 were used as the materials with high and low refractive indices.The group-delay dispersion curves were smoothed out by pairing the phase-delay mirrors with their complementary mirrors.The phase-delayed mirrors with phase modulation data of−800 GDD were prepared,and the reflectivity reached more than 99%in the range of 900 nm−1100 nm.The bandwidth adjustment problem of femtosecond laser systems is solved to meet the requirements of femtosecond lasers.

关 键 词：群色散延迟 低振荡 反射镜 宽带调节 相位调控 

分 类 号：O436[机械工程—光学工程]