基于石墨烯材料表征的原子力显微分析测试条件探究  

Exploration of measuring conditions for atomic force microanalysis based on graphene material characterization

作　　者：徐岩岩 王良旺 张永红 XU Yanyan;WANG Liangwang;ZHANG Yonghong(Guangzhou Academy of Special Equipment Inspection&Testing,Guangzhou 510100,China)

机构地区：[1]广州特种设备检测研究院,广东广州510100

出　　处：《中国测试》2024年第11期47-55,共9页China Measurement & Test

基　　金：广东省市场监督管理局科技项目(2023CT10);市场监管总局科技项目(2023MK147);广州市市场监督管理局科技项目(2024KJ21,2024KJ16,2024KJ23)。

摘　　要：原子力显微镜(AFM)是石墨烯材料结构形貌表征最常用的仪器,但AFM测试条件的选择和控制对于能否真实地反映石墨烯材料的结构形貌信息起着决定作用,由此对利用AFM用于石墨烯材料的厚度和粗糙度的测试条件进行研究。探究石墨烯材料厚度测量过程中的基底以及测量模式,并对自制的石墨烯单晶晶圆和氧化石墨烯(GO)纳米片的粗糙度测量过程中的探针类型进行探究。结果表明,石墨烯材料厚度测量过程中,最合适的基底是粗糙度较小的云母片,最合适的测量模式是扫描范围较大且和样品之间作用力比较小的峰值力轻敲模式;石墨烯材料的粗糙度测量过程中,为较真实地反映出石墨烯材料表面的细微结构,应选择曲率半径比较小的探针。Atomic force microscopy(AFM)is the most commonly used instrument for the characterization of the structure and microtopography of graphene materials.However,the measurement conditions of AFM should be carefully selected and controlled,because only in this way can the structure and microtopography of graphene materials be truly and accurately reflected.The conditions for measuring the thickness and roughness of graphene materials using AFM were investigated.The types of substrates in the thickness measurement of graphene materials and the measurement mode of AFM were studied.The types of probes used in the roughness measurement of homemade graphene single wafer and graphene oxide(GO)nanosheet were also investigated.The results indicated that for the thickness measurement of graphene materials,the smooth mica sheet was selected as the most suitable substrate,and the peak force tapping mode was the most suitable mode for measuring the thickness of the graphene material due to the large scanning range and the small force between the probe and the sample.For the roughness measurement of graphene materials,probes with relatively small tip radius should be selected in order to accurately reflect the fine structure of the surface of the graphene materials.

关 键 词：原子力显微镜 石墨烯材料 基底 测量模式 探针 

分 类 号：TB9[一般工业技术—计量学] TB303[机械工程—测试计量技术及仪器] TH742[理学—无机化学] O613.71[理学—化学]