高纯石英SiO_(2)纯度检测方法研究  

Study on determination method of SiO_(2) content in high purity quartz

作　　者：韦聪 任兵建[1] 罗悦 韦朝海 WEI Cong;REN Bingjian;LUO Yue;WEI Chaohai(China Resources Cement Technology Research and Development Co.,Ltd.,Guangzhou 510460,China;School of Emergent Soft Matter,South China University of Technology,Guangzhou 511442,China;School of Environment and Energy,South China University of Technology,Guangzhou 510006,China)

机构地区：[1]华润水泥技术研发有限公司,广东广州510460 [2]华南理工大学前沿软物质学院,广东广州511442 [3]华南理工大学环境与能源学院,广东广州510006

出　　处：《中国测试》2024年第11期82-89,共8页China Measurement & Test

基　　金：企业自主研发项目(CRC-2022-K-11)。

摘　　要：为解决高纯石英SiO_(2)纯度检测结果存在准确度低和精确度差的缺陷,拟构建高纯石英SiO_(2)纯度检测方法,包括化学分析法和仪器分析法。通过设计预处理过程耦合响应曲面法获取优化的测试操作参数,并分析高纯石英中杂质的主要种类以及杂质类别对检测结果精确度的影响。结果表明:HF酸剂量、样品质量对测试结果的影响大于消解温度和消解时间;化学分析法适用于纯度为99.0%~99.9%的高纯石英样品,相对标准偏差(DRS)≤5%,仪器分析法适用于纯度为99.99%的高纯石英样品,DRS≤20%。因此,构建的检测方法适用于高纯石英中SiO_(2)纯度检测,具有低检出限和灵敏度高的优点。In order to solve current determination technology with the defects of low accuracy and poor precision,this study intends to construct a method for SiO_(2) content in high purity quartz,including chemical and instrument analysis.The optimized test operation parameters were obtained by designing the pretreatment process coupled with the response surface method.Meanwhile,the main types of impurities in high purity quartz and the influence of impurity types on the accuracy of the test results were analyzed.The results showed that the effect of HF dosage and sample quality on the test results was greater than that of digestion temperature and digestion time.The chemical analysis method is suitable for high purity quartz samples with purity of 99.0%-99.9%,the relative standard deviation(DRS)is≤5%,and the instrument analysis method is suitable for quartz samples with purity of 99.99%,DRS is≤20%.Therefore,this method can be applied to the analysis of SiO_(2) purity in high purity,with the advantages of low detection limit and high sensitivity.

关 键 词：高纯石英 二氧化硅 分析方法 响应曲面法 探针反应 

分 类 号：TB9[一般工业技术—计量学] O661[机械工程—测试计量技术及仪器]