磁控溅射系统共享效率提升策略及成效分析  

Enhancement Strategy and Effectiveness Analysis of Sharing Efficiency of Magnetron Sputtering System

作　　者：孙家宝 刘志[1] 孙一军[1] SUN Jiabao;LIU Zhi;SUN Yijun(Micro-Nano Fabrication Center,Zhejiang University,Hangzhou 310013,China)

机构地区：[1]浙江大学微纳加工中心,杭州310013

出　　处：《实验室研究与探索》2024年第11期226-229,246,共5页Research and Exploration In Laboratory

摘　　要：针对浙江大学微纳加工中心磁控溅射系统开放共享效率低下的问题,提出了一种基于微信应用程序的新预约管理策略。该策略克服了传统网站预约管理过程中存在的预约时间段分散、靶材种类数超过设备最大限制等诸多不足,同时实现了对设备便捷高效的预约管理。实践表明:该策略可显著提升设备的使用率、用户的预约效率和设备管理人员的工作效率;与2019年度相比,2023年度设备的年度机时数、使用记录数和用户人数分别由619 h、440条和81人持续提高到2731 h、1765条和261人。该设备在2022、2023年度连续2年获得浙江大学开放共享优秀机组称号。Regarding the problem of low sharing efficiency of the magnetron sputtering system in the Micro-Nano Fabrication Center of Zhejiang University,a new reservation management method based on the WeChat application is proposed.This method overcomes many shortcomings in the traditional website reservation management,such as the reservation time slots scattered,the target types exceed the equipment limit.Meanwhile,it realizes the convenient and efficient reservation management.Practice indicates that the new method can greatly improve the reservation efficiency of users,the work efficiency of managers,and the utilization of equipment.By applying the new management method,the annual experiment hours,usage records and number of users of the equipment have continued to increase from 619 hours,440 and 81 in 2019 to 2731 hours,1765 and 261 in 2023,respectively.The equipment won the title of Zhejiang University Open Sharing Excellent Unit for two consecutive years in 2022 and 2023.

关 键 词：共享效率提升 磁控溅射镀膜系统 微信预约管理策略 成效分析 

分 类 号：N33[自然科学总论]