集成化光纤陀螺用高宽深比氮化硅光引擎芯片  

Silicon-Nitride Optical Engine Chip for Integrated Fiber-Optic Gyroscope

作　　者：李佳龙 牛亚楠 冯昌坤 姜腾蛟 李淑娴[1] 李加东[3,4] Li Jialong;Niu Yanan;Feng Changkun;Jiang Tengjiao;Li Shuxian;Li Jiadong(College of Mechanical Engineering,Dalian University,Dalian 116622,Liaoning,China;Mechanical and Electrical College,Handan University,Handan 056000,Hebei,China;Suzhou Institute of Nano-Tech and Nano-Bionics Lightweight Laboratory,Chinese Academy of Sciences,Suzhou 215123,Jiangsu,China;Key Laboratory of Multifunctional Nanomaterials and Smart Systems,Chinese Academy of Sciences,Suzhou 215123,Jiangsu,China)

机构地区：[1]大连大学机械工程学院,辽宁大连116622 [2]邯郸学院机电学院,河北邯郸056000 [3]中国科学院苏州纳米技术与纳米仿生研究所轻量化实验室,江苏苏州215123 [4]中国科学院多功能材料与轻巧系统重点实验室,江苏苏州215123

出　　处：《激光与光电子学进展》2024年第19期249-256,共8页Laser & Optoelectronics Progress

基　　金：国家重点研发计划(2021YFB3201600);集成电路材料全国重点实验室开放课题(NKLJC-K2023-10);邯郸市科技计划项目(21422031161)。

摘　　要：针对惯性导航系统对光纤陀螺小型化和低成本的迫切需求,提出并设计了一种基于高宽深比氮化硅波导的集成化光纤陀螺用光引擎芯片。该芯片可兼具光源耦合、分束、传输和起偏等片上功能。光引擎芯片主要由两个1×2多模干涉(MMI)分束器和起偏器构成。通过Lumerical FDTD对芯片的重要参数进行仿真计算,确定MMI分束器的尺寸,为15μm×200μm。该芯片偏振消光比可达33 dB,且分光均匀。最后,讨论并设计了氮化硅光引擎芯片低损耗的加工工艺。所设计的高宽深比氮化硅光引擎芯片,为高精度光纤陀螺的小型化和集成化奠定了坚实的基础。To fulfill the urgent demand for the miniaturization and cost reduction of fiber-optic gyroscopes in inertial navigation systems,an integrated optical engine chip for fiber-optic gyroscopes based on high-aspect-ratio silicon-nitride waveguides is proposed and designed.This chip offers on-chip functions such as light-source coupling,beam splitting,transmission,and polarization.The optical engine chip mainly comprises two 1×2 multimode interference(MMI)beam splitters and polarizers.The important parameters of the chip were simulated and calculated using Luminary FDTD to determine the size of the MMI beam splitter,which is 15μm×200μm.The polarization extinction ratio can reach 33 dB and the splitting is uniform.Finally,a low-loss processing method for silicon-nitride optical engine chips is devised.The designed high-aspect-ratio silicon-nitride optical engine chip serves as a solid foundation for the miniaturization and integration of high-precision fiber-optic gyroscopes.

关 键 词：集成化光纤陀螺 高宽深比氮化硅波导 光引擎芯片 MMI分束器 

分 类 号：V241[航空宇航科学与技术—飞行器设计]