基于十字型异质多芯波导的硅光端面耦合器  

Edge Coupler in Silicon Photonics Based on Cross-Type Heterogeneous Multi-Core Waveguide

作　　者：张立桀 范艳晶 胡晶晶[2] 成雨萱 谷一英 Zhang Lijie;Fan Yanjing;Hu Jingjing;Cheng Yuxuan;Gu Yiying(School of Optoelectronic Engineering and Instrumentation Science,Dalian University of Technology,Dalian 116024,Liaoning,China;School of Physics,Dalian University of Technology,Dalian 116024,Liaoning,China)

机构地区：[1]大连理工大学光电工程与仪器科学学院,辽宁大连116024 [2]大连理工大学物理学院,辽宁大连116024

出　　处：《光学学报》2024年第19期233-240,共8页Acta Optica Sinica

基　　金：国家重点研发计划(2019YFB2203201);国家自然科学基金(61605023,61805032)。

摘　　要：提出了一种基于十字型氮化硅(Si3N4)波导-半刻蚀硅波导结构的异质多芯端面耦合器,以实现光纤和绝缘体上硅条形波导的模场匹配。该设计采用Si_(3)N_(4)波导和硅(Si)波导共同引导光模场的结构,简化了工艺流程,避免了对二氧化硅(SiO_(2))进行深刻蚀和氮氧化硅(SiON)的使用,实现了硅光芯片与光纤的高效耦合。仿真结果表明:在1550 nm处,该端面耦合器与高数值孔径光纤端面的耦合效率为97.1%(横电模,耦合损耗为-0.13 dB)、97.5%(横磁模,耦合损耗为-0.11 dB)。Objective Integrated photonics has undergone significant development in the past two decades,particularly silicon photonics,thanks to the mature complementary metal oxide semiconductor(CMOS)process flow.Despite advancements in silicon photonic chip technology and their widespread applications in various sectors such as lidar,medical detection,and military defense,a significant hurdle remains in the efficient transfer of information between these chips and the external world via optical fibers.Since current manufacturing processes are unable to provide the best properties in a singlematerial optical system,achieving low-loss transmission between different material systems becomes extremely important.Edge coupling emerges as one of the most promising methods for information exchange in optical chips compared with grating coupling,which exhibits lower coupling efficiency in high-power systems.According to the refractive index of the materials used,edge couplers can be categorized into two types:1)waveguides with low refractive index and large crosssection size,mainly involving SiOx and SU-8 glue;2)waveguides with high refractive index and small cross-section size,with representative materials such as SiON and Si_(3)N_(4).With the development of alignment accuracy in stepper exposure during the optical chip manufacturing process,the manufacturing requirements of multilayer waveguides are gradually being met.Consequently,more research is focusing on waveguides with high refractive index and small cross-section size.However,most proposed edge couplers are based on waveguides of three layers or are based on doping or deep etching of the cladding SiO_(2).To simplify the manufacturing process while maintaining high coupling efficiency,we propose and optimize a novel edge coupler based on a cross-type heterogeneous multi-core waveguide.By guiding light with silicon nitride waveguide and silicon waveguide together,this design utilizes one less layer of Si_(3)N_(4) waveguide and eliminates the need for deep etching of SiO_(2

关 键 词：端面耦合 模斑转换器 氮化硅波导 集成光学器件 多芯波导 

分 类 号：TN256[电子电信—物理电子学]