非球面微柱面透镜阵列精密玻璃模压仿真研究  

Simulation of Precision Glass Molding for Aspherical Cylindrical Microlens Arrays

作　　者：王启林 姚鹏 王一帆 何婉盈 黄传真 Wang Qilin;Yao Peng;Wang Yifan;He Wanying;Huang Chuanzhen(School of Mechanical Engineering,Shandong University,Jinan 250061,Shandong,China;School of Mechanical Engineering,Yanshan University,Qinhuangdao066004,Hebei,China)

机构地区：[1]山东大学机械工程学院,山东济南250061 [2]燕山大学机械工程学院,河北秦皇岛066004

出　　处：《中国激光》2024年第20期32-42,共11页Chinese Journal of Lasers

基　　金：国家自然科学基金区域创新发展联合基金(U23A20632);山东省重大基础研究项目(ZR2023ZD34);深圳市科技计划(GJHZ20210705142537003,JCYJ20220818100408019)。

摘　　要：为了实现精密玻璃模压过程中石英玻璃应力状态的准确预测以及工艺参数的优化,进行了非球面微柱面透镜阵列精密玻璃模压的有限元仿真研究。首先,进行了石英玻璃最小单轴蠕变测试;然后,对石英玻璃黏弹参数进行了有限元仿真验证;最后,通过有限元仿真,分析了多个模压工艺参数对最大应力的影响,获得了优化的工艺参数。建立了石英玻璃黏弹性本构模型,获得了其时温等效模型,并利用有限元仿真验证了模型的准确性。对非球面微柱面透镜阵列模压成形参数进行了有效优化,在下压量为1.5 mm的前提下,保压后的透镜最大应力为0.9693 MPa。研究结果为石英玻璃非球面微柱面透镜阵列精密模压实验提供了理论参考。Objective Fused silica aspherical cylindrical microlens arrays(ACMAs)are widely used in high-power lasers,mask aligners,large ground-to-air telescopes,and other optical systems that require high precision or operate in extreme environments because of their special geometric characteristics and excellent optical performance.Precision glass molding technology is the first choice for processing optical glass components with high precision,high efficiency,and low cost,compared with traditional array processing methods,such as ultra-precision machining,etching,and laser processing.However,it is difficult to monitor the glass molding process.Hence,finite element simulation is an effective means by which to study the molding process.However,the accuracy of finite element simulation is closely related to the thermo-mechanical and thermo-viscoelastic characteristics of glass.In particular,the thermo-viscoelastic parameters have the most important influence on the accuracy of molding simulation.In this study,we investigate the high-temperature viscoelastic properties of fused silica and establish a corresponding viscoelastic constitutive model.Then,a simulation study of fused silica ACMA precision molding is carried out,and the effects of the process parameters on the maximum stress of the lens are analyzed to provide a reference for fused silica ACMA experiments.Methods In this study,the minimum uniaxial creep test(MUCT)of fused silica is carried out,and the creep displacement of a fused silica cylinder is obtained.Based on the generalized Maxwell model and Williams-Landel-Ferry(WLF)equation fitting,the viscoelastic constitutive model and time-temperature equivalent model of fused silica are established.To accurately predict the stress state during the fused silica ACMA molding process,it is necessary to ensure the accuracy of the viscoelastic parameters.Therefore,the obtained viscoelastic parameters of fused silica by MUCT are simulated via the finite element method.Finally,the fused silica ACMA molding is simulated.The

关 键 词：精密玻璃模压 石英玻璃 非球面微柱面透镜阵列 有限元仿真 最小单轴蠕变压缩 最大应力 

分 类 号：TH164[机械工程—机械制造及自动化]