飞秒激光动态振荡扫描实现石英玻璃高效刻蚀  

High-Efficiency Femtosecond Laser Scribing on Fused Silica Assisted by Dynamic Oscillatory Scanning

作　　者：高程远 高文海 廖洋[2] 杜鹃 谢少明 陈聪 刘科 彭宇杰 冷雨欣[2] Gao Chengyuan;Gao Wenhai;Liao Yang;Du Juan;Xie Shaoming;Chen Cong;Liu Ke;Peng Yujie;Leng Yuxin(School of Microelectronics,Shanghai University,Shanghai 201800,China;State Key Laboratory of High Field Laser Physics,Shanghai Instituteof Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;School of Physics and Optoelectronic Engineering,Hangzhou Institutefor Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,Zhejiang,China)

机构地区：[1]上海大学微电子学院,上海201800 [2]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800 [3]中国科学院大学杭州高等研究院物理与光电工程学院,浙江杭州310024

出　　处：《中国激光》2024年第20期276-282,共7页Chinese Journal of Lasers

基　　金：国家重点研发计划(2022YFA1604403,2023YFB3307700);国家自然科学基金(62375060);浙江省科技厅研发攻关计划(2024C01192);上海科技创新行动计划(22JC1403200)。

摘　　要：飞秒激光刻蚀加工具有精度高、热效应小等优势,但较低的去除效率却成为了限制其广泛应用的主要障碍。近年来,优化激光扫描策略以提升加工效率的研究得到了广泛关注。为提升石英玻璃表面微槽刻蚀的效率,提出了振镜高速扫描和运动平台慢速直写相结合的复合扫描策略:在运动平台实现预定轨迹划刻的同时,激光焦斑在扫描振镜控制下高速振荡扫描。实验表明,平台移动速度和扫描振荡幅度等参数对石英玻璃表面微槽刻蚀的效率有显著影响。与传统激光刻写相比,在相同激光功率和相同移动速度下,基于动态振荡扫描的刻写深度有10倍以上的提升。通过改变振荡扫描路径在不同位置的辐照时间占比,验证了该技术具有对微槽截面形状进行调控的能力。基于动态振荡扫描的高效激光划刻技术有望为各种表面微结构的高效加工带来新的机遇。Objective Quartz glass is widely used in the semiconductor,optics,and biomedicine fields,among others.However,because of its high hardness and brittleness,the processing accuracy and edge quality of traditional methods are limited.As an advanced processing technology,which has developed rapidly recently,femtosecond laser machining has the advantages of high precision and a small heat-affected zone,demonstrating its potential for high-end quartz glass processing.Unfortunately,currently,the removal rate of femtosecond laser ablation is low,which limits its industrial application.To achieve high-efficiency scribing on fused silica using a femtosecond laser,a composite scanning strategy that combines high-speed galvanometer scanning and slow direct writing with an X-Y translation stage is proposed in this study.We believe that this technique will significantly improve the efficiency of quartz glass laser processing and enable the flexible control of the cross-sectional geometry of laser-ablated microgrooves.Methods First,a quartz glass sample is placed on a 2D motorized translation stage.A circularly polarized femtosecond laser with a wavelength of 1064 nm and pulse duration of 800 fs is guided into a galvanometer scanner.After passing through the galvanometer and 4f system,the laser is focused on the quartz glass surface using an objective lens.To implement high-efficiency femtosecond laser scribing,a 2D translation stage is used to realize laser scribing along a predetermined trajectory,while the galvanometer scanning system enables dynamic oscillatory scanning of the laser focus spot around the trajectory.By maintaining the same laser irradiation fluence(laser power and irradiation time)for each oscillating scan,the effects of the oscillating scanning path,scanning amplitude,and stage translation speed on the laser-ablated microgrooves are investigated in detail.Additionally,an oscillatory scanning path is used to change the laser energy deposition distribution and thus control the cross-sectional geometry of the

关 键 词：激光加工 高效激光划刻 动态振荡扫描 表面微槽加工 飞秒激光 

分 类 号：V261.8[航空宇航科学与技术—航空宇航制造工程]