PZT基多层剪切型压电陶瓷致动器驱动性能  

Driving Performance of PZT-Based Multi-Layer Shear Piezoelectric Ceramic Actuator

作　　者：王振宇 王世杰 王鹏 张东雷 郭明楷 秦国帅 卢春生[2,3] Wang Zhenyu;Wang Shijie;Wang Peng;Zhang Donglei;Guo Mingkai;Qin Guoshuai;Lu Chunsheng(School of Mechanical and Electrical Engineering,Henan University of Technology,Zhengzhou 450018,China;Engineering Research Center of Strength and Accident Prevention,Zhengzhou University,Zhengzhou 450018,China;School of Civil and Mechanical Engineering,Curtin University,Perth WA6845,Australia)

机构地区：[1]河南工业大学机电工程学院,郑州450018 [2]郑州大学强度与事故预防工程研究中心,郑州450018 [3]科廷大学土木与机械工程学院,澳大利亚珀斯WA6548

出　　处：《微纳电子技术》2024年第12期97-105,共9页Micronanoelectronic Technology

摘　　要：随着驱动技术向微型化与高精度化方向发展,压电致动器因其在精确位移控制和快速响应方面的优势而受到广泛关注。提出了一种基于锆钛酸铅(PZT)陶瓷的多层剪切型压电致动器,并采用有限元分析方法及自主开发的新型实验平台对其驱动性能进行深入研究。结果表明,致动器的驱动性能主要受输入电压频率和幅值的影响,在适当的频率与低电压条件下可实现更高的调控分辨率。此外,当结构施加的预紧力超过最大负载时,致动器的驱动性能下降约50%,即通过预紧力可有效调控致动器的驱动性能,该结果为压电致动器的工作模式分析以及多层压电陶瓷的电学结构优化提供了重要的依据。With the trend of miniaturization and high precision in drive technology,piezoelectric actuators have received wide attention due to their advantages in precise displacement control and rapid response.A multi-layer shear piezoelectric actuator based on lead zirconate titanate(PZT)ceramics was proposed,and its driving performance was investigated in-depth using the finite element analysis method and a newly self-developed experimental platform.The results show that the driving performance of the actuator is mainly influenced by frequency and amplitude of the input voltage,and higher control resolution can be achieved under appropriate frequency and low voltage conditions.Moreover,when the pretightening force applied to the structure exceeds the maximum load,the driving performance of the actuator decreases by about 50%,indicating that the driving performance of the actuator can be effectively regulated via the pretightening force.The result provides an important basis for the analysis of the working mode of piezoelectric actuators and the optimization of the electrical structure of multi-layer piezoelectric ceramics.

关 键 词：压电致动器 锆钛酸铅(PZT) 多层剪切型 驱动性能 微型化 

分 类 号：TN304.9[电子电信—物理电子学]