基于弧形边缘结构上极板的数字微流控芯片系统  

Digital Microfluidic Chip System Based on Upper Pole Plate with Curved-Edge Structure

作　　者：查俊莹 关一民 Zha Junying;Guan Yimin(School of Microelectronics,Shanghai University,Shanghai 201800,China;Shanghai Aurefluidics Technology Co.,Ltd.,Shanghai 201800,China)

机构地区：[1]上海大学微电子学院,上海201800 [2]上海傲睿科技有限公司,上海201800

出　　处：《微纳电子技术》2024年第12期138-145,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金委员会重点项目(82130069)。

摘　　要：为降低微尺度液滴在介电润湿(EWOD)基板上的转移难度,提出了一种基于弧形边缘结构上极板的数字微流控芯片系统,可顺利完成液滴在开放区和封闭区之间的输运。从数字微流控芯片的基本原理出发,介绍了该芯片的结构设计、制造工艺及平台构建,并对此系统中液滴在两区运动时两极板间距、液滴体积及上极板横向位置对驱动电压的影响进行了研究。实验结果表明:基于氧化铟锡(ITO)玻璃的上极板与基于铬板的下极板间距为200μm、液滴体积为1.75~2μL、上极板横向位置在电极中间时,有利于实现液滴在两个区域的自由往返输运。通过优化上极板设计,液滴在两区运动所需最低驱动电压降至67~77 V,相较于传统上极板的240~300 V驱动电压,降幅高达约75%,避免了高电压对样本的破坏,为后续生物化学分析中样品信息的保留提供了有效支持。To reduce the difficulty of microscale droplet transfering on electrowetting-on-dielectric(EWOD)substrates,a digital microfluidic chip system based on upper pole plate with curvededge structure was proposed,which can successfully accomplish droplet transporting between open and closed zones.Starting from the basic principle of digital microfluidic chip,the structural design,fabrication process,and platform construction of the chip were introduced.And influences of the spacing between two pole plates,droplet volume,and lateral position of the upper pole plate on the driving voltage during the two-zone motion of the droplet in the system were investigated.The experiment results show that when the spacing between the upper pole plate based on indium tin oxide(ITO)glass and the lower pole plate based on chromium plate is 200μm,the droplet volume is 1.75-2μL,and the lateral position of the upper pole plate is in the middle of the electrodes,which is conducive to realize the free round-trip transportation of droplets between the two zones.By optimizing the design of the upper pole plate,the minimum driving voltage for the two zone movement of droplets is reduced to 67-77 V,which is reducing up to about 75%comparing with the drivig voltage of 240-300 V of the conventional upper pole plate,and preventing the sample from being damaged by high voltage,and effectively retaining the sample information for the subsequent biochemical analysis.

关 键 词：数字微流控 介电润湿(EWOD) 弧形边缘结构上极板 两区运动 驱动电压 

分 类 号：Q819[生物学—生物工程] O35[理学—流体力学]