微齿轮模具的兆声射流协同辅助掩膜电解加工定域性  

Localization of Micro-Gear Mold in Megasonic with Jet-Assisted Through-Mask Electrochemical Machining

作　　者：杜立群[1,2] 程浩浩 于明新 王丰来 张策 李董 Du Liqun;Cheng Haohao;Yu Mingxin;Wang Fenglai;Zhang Ce;Li Dong(State Key Laboratory of High-Performance Precision Manufacturing,School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Micro/Nano Technology and System of Liaoning Province,School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学机械工程学院高性能精密制造全国重点实验室,辽宁大连116024 [2]大连理工大学机械工程学院辽宁省微纳米技术及系统重点实验室,辽宁大连116024

出　　处：《微纳电子技术》2024年第12期146-156,共11页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(52375561,51975103)。

摘　　要：在微齿轮模具的掩膜电解加工(TMEMM)中,金属的各向同性刻蚀属性导致了在加工过程中难以避免的侧蚀现象,从而显著降低了加工的定域性和精度。为解决这一问题,提出了一种兆声射流协同辅助掩膜电解加工(MJ-TMEMM)方法。建立了兆声射流协同辅助掩膜电解加工的仿真模型,对加工中的声-电-流多能场进行了仿真分析。仿真结果表明,兆声射流协同辅助方法显著提高了掩膜电解加工的定域性。基于仿真分析进行了兆声射流协同辅助掩膜电解加工微齿轮模具实验。实验结果表明,兆声射流协同辅助掩膜电解加工相较于传统掩膜电解加工,微齿轮模具的加工定域性提高了95%。最终,在仿真和实验研究的基础上,采用优选后的工艺参数制备了齿数16、模数0.15 mm且符合设计要求的微齿轮模具。与传统掩膜电解加工相比,采用兆声射流协同辅助掩膜电解加工方法制作的微齿轮模具齿顶圆刻蚀因子从1.19提高至2.6,齿根圆刻蚀因子从1.36提高至3.74。In the through-mask electrochemical machining(TMEMM)of micro-gears,the isotropic etching properties of metals lead to unavoidable lateral etch,which significantly reduces the localization and accuracy of TMEMM.To solve the problem,the megasonic with jet-assisted TMEMM(MJ-TMEMM)was proposed.A simulation model for MJ-TMEMM was established,and the acoustic-electric-flow multi-energy field during machining was simulated and analyzed.The simulation results show a significant improvement in the machining localization in MJTMEMM.Based on the simulation analysis,the MJ-TMEMM experiments of micro-gear molds were conducted.The experimental results indicate that compared with the traditional TMEMM,the localization of micro-gear molds is improved by 95%in MJ-TMEMM.Finally,based on simulation and experimental research,a micro-gear mold with 16 teeth and 0.15 mm module was prepared using the optimized process parameters,which meets the design requirements.Compared with the traditional TMEMM,the tooth top circle etching factor of micro-gear molds processed by MJ-TMEMM increases from 1.19 to 2.6,and the tooth root circle etching factor increases from 1.36 to 3.74.

关 键 词：掩膜电解加工(TMEMM) 微齿轮模具 射流 兆声 定域性 

分 类 号：TH706[机械工程—仪器科学与技术] TN305[机械工程—精密仪器及机械]