非导电样品在X射线光电子能谱测试中的荷电效应问题及其改善方法  

Problem and Improvement Methods of Charge Effect for Non-Conductive Samples in X-ray Photoelectron Spectroscopy Testing

作　　者：范文杰 崔园园 曾丽珍 彭何龙 FAN Wenjie;CUI Yuanyuan;ZENG Lizhen;PENG Helong(Analysis and Testing Center,South China Normal University,Guangzhou 510006,China;Shimadzu China Co.Ltd.,Shanghai 200233,China)

机构地区：[1]华南师范大学分析测试中心,广东广州510006 [2]岛津企业管理(中国)有限公司,上海200233

出　　处：《分析测试技术与仪器》2024年第6期385-391,共7页Analysis and Testing Technology and Instruments

摘　　要：非导电样品的荷电效应问题对X射线光电子能谱(XPS)的测试结果影响较大,往往会导致谱峰位移、畸变、展宽或强度衰减等现象.因此,有效降低非导电样品表面荷电积累,减少荷电效应对测试结果影响,是XPS工作者必须重视的问题.针对非导电样品在XPS测试中易产生荷电效应的问题,主要从样品选择与制备、荷电中和系统、电接触、光照方面着手研究,找出荷电效应原因,并提出改善方法.The charge effect problem of non-conductive samples has a significant impact on X-ray photoelectron spectroscopy(XPS)test results,often leading to abnormal phenomena such as peak displacement,distortion,broadening,intensity attenuation,etc.Therefore,XPS researchers should pay attention to reducing the surface charge accumulation on non-conductive samples to minimise the charge effect on test results.Aiming at the charge effect problem that non-conductive samples easily generate during XPS testing,the causes were discussed based on the studies of sample selection and preparation,charge neutralization system,electrical contact,illumination.And the improvement methods of charge effect were proposed.

关 键 词：X射线光电子能谱 非导电样品 荷电效应 荷电原因 改善方法 

分 类 号：O657.62[理学—分析化学]