基于透射光谱法的固体隙法布里-珀罗腔腔长检测技术研究  

Transmission Spectroscopy Based Cavity Length Detection Technique for Solid-Gap Fabry-Perot Cavity

作　　者：潘海涛 陆家加 龚秋成 张斌[1,2] 谭中奇[1,2] PAN Hai-tao;LU Jia-jia;GONG Qiu-cheng;ZHANG Bin;TAN Zhong-qi(College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China;Nanhu Laser Laboratory,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学前沿交叉学科学院,湖南长沙410073 [2]国防科技大学南湖之光实验室,湖南长沙410073

出　　处：《光学与光电技术》2024年第6期27-36,共10页Optics & Optoelectronic Technology

基　　金：国家自然科学基金(62375285);湖南省自然科学基金(2023JJ30639);国防科技大学自主创新科学基金(22-ZZCX-063)资助项目。

摘　　要：法布里-珀罗腔(法珀腔)作为一种常见的光学器件在天文探测、精密测量、传感器等领域具有广泛的应用。目前在大气检测滤波应用中广泛使用的仍是传统气体隙法布里-珀罗腔。然而,气体隙法珀腔存在体积较大、机械振动等弊端,这会显著影响其工作性能,固体隙法珀腔由于一体化优势可以很好地规避这些问题。为了保证固体隙法珀腔的滤波效果,提出一种对固体隙法珀腔腔长检测的方法,通过预先对硬件固有参数进行控制,以实现法珀腔滤波性能的精准把控,从而实现减小硬件体积、避免调谐振动,为法珀滤波器件的星载应用提供支撑。基于该方法搭建了一套透射光谱检测系统,开展了基片的检测实验。实验结果表明,该系统对基片上单点的待加工量检测波动为20 nm。该方法初步实现了对固体隙法珀腔腔长的精密检测,验证了对于其固有参数控制的可行性;同时基于该方法利用光反馈腔增强稳频系统进行了8 mm厚度基片的检测,得到清晰的透射谱线,验证了该方案具有检测范围较宽的优势。为实现从硬件层面精准把控固体隙法珀腔滤波性能奠定了基础,同时有望实现现有抛光工艺抛光去除量的精准标定。The Fabry-Perot cavity(F-P cavity)is a widely utilized optical device with a multitude of applications,including those in astronomical detection,precision measurement,and sensor technology.At present,the conventional gas-gap Fabry-Perot cavity continues to be the preferred option for atmospheric detection and filtering applications.However,this type of cavity is subject to significant disadvantages,including a large volume and susceptibility to mechanical vibrations,which can have a detrimental impact on its performance.In contrast,the solid-gap Fabry-Perot cavity offers the potential for integration advantages that can effectively mitigate these issues.To guarantee the optimal filtering performance of the solid-gap Fabry-Perot cavity,a methodology for the precise determination of its cavity length is presented in this paper.By proactively regulating intrinsic hardware parameters,precise control of the filtering performance can be attained.This not only reduces the hardware size but also minimizes tuning-induced vibrations,thereby supporting the utilization of Fabry-Perot filter devices in spaceborne applications.A transmission spectral detection system is developed based on the aforementioned methodology,and the experimental tests are conducted on substrates.The results demonstrate that the system displays a fluctuation of 20 nm when measuring processing amounts at discrete points on the substrate.This method has successfully demonstrated initial precision in detecting the cavity length of the solid-gap Fabry-Perot cavity while confirming the feasibility of controlling its inherent parameters.Furthermore,the use of light feedback within an enhanced stabilization system enables the successful detection of an 8 mm thick substrate with clear transmission spectral lines,thereby highlighting the scheme's advantage in offering a broader detection range.This research establishes a fundamental basis for achieving precise control over filtering performance at the hardware level,which has the potential to facilitate accur

关 键 词：透射光谱法 法布里-珀罗腔 固体隙法珀腔 腔长检测 相对厚度测量 

分 类 号：O439[机械工程—光学工程]