准分子激光对CH_(3)NH_(3)PbI_(3)钙钛矿薄膜材料加工研究(特邀)  

Processing of perovskite thin films by excimer laser(invited)

作　　者：喻学昊 方晓东 游利兵 杨礼昭 YU Xuehao;FANG Xiaodong;YOU Libing;YANG Lizhao(College of New Materials And New Energies,Shenzhen Technology University,Shenzhen 518118,China;Shenzhen Shengfang Technology Company Limited,Shenzhen 518116,China)

机构地区：[1]深圳技术大学新材料与新能源学院,广东深圳518118 [2]深圳盛方科技有限公司,广东深圳518116

出　　处：《红外与激光工程》2024年第11期43-51,I0004,共10页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(62175167);广东省科技计划项目(2021QN02Z552);广东省重点建设学科科研能力提升项目(2021ZDJS112);深圳市科技计划资助项目(KQTD20170331115422184,JCYJ20210324120207021,JSGG20220831094202005)。

摘　　要：有机-无机杂化钙钛矿材料以其独特的结构和性能在很多器件中得到应用,因此激光对钙钛矿薄膜加工性能的研究也得到重视。文中研究了波长248 nm的准分子激光对CH_(3)NH_(3)PbI_(3)钙钛矿薄膜材料的作用效应。实验分析了激光能量密度和脉冲数对钙钛矿薄膜的形貌和加工深度的影响,并与波长517 nm的飞秒激光加工效果进行了比较。研究结果表明:248 nm波长的准分子激光可以通过烧蚀等效应对钙钛矿薄膜材料实现有效加工,为准分子激光在钙钛矿薄膜器件加工中的应用提供了实验依据。Objective In recent years,organic-inorganic hybrid perovskites have attracted the attention of the photovoltaic industry for their excellent photoelectric properties and efficient solar cell processing technology.The current highest efficiency record for single-layer perovskite solar cell device certification is 26.1%,and the highest efficiency record for series structure perovskite solar cell device certification is 29.1%.However,bringing perovskite thin-film photovoltaic technology to the market still faces some problems that need to be solved.At present,the high-efficiency perovskite solar cell devices are small size devices obtained in the laboratory,when the device area is enlarged,the series resistance of perovskite solar cells will increase linearly with the increase of the area(especially the TCO substrate),and eventually cause huge performance loss.Therefore,in order to commercialize perovskite solar cells,a larger area of solar cell series modules must be obtained.The excimer laser wavelength is in the deep ultraviolet band,the perovskite material has high absorption rate and shallow action depth,which is expected to trigger the ablation mechanism and accurately remove the perovskite material by layer,obtain a clean bottom and boundary,and effectively protect the underlying device.In this paper,the processing mechanism of perovskite thin films(MAPbI_(3))by excimer laser is studied.The chemical composition residue and surface morphology of perovskite thin films treated by excimer laser and fs laser were compared.Methods Due to the low transparency of the glass substrate aligned molecular laser,excimer laser processing uses the film side irradiation.The effects of excimer laser and fs laser on the processing of perovskite thin films were compared by two irradiation methods:film side and glass side.Field emission scanning electron microscope(FE-SEM),energy dispersive spectrometer(EDS)and white light interference microscopy(WLIM)were used to characterize the surface morphology and residual elements of the s

关 键 词：激光材料加工 准分子激光 钙钛矿薄膜 飞秒激光 

分 类 号：TN249[电子电信—物理电子学]