表面效应对纳米开关结构线性弯曲行为的影响  

Effect of surface effect on linear bending behavior ofnano-switch structure

作　　者：杨帆[1] 王旭阳 李诚波 YANG Fan;WANG Xuyang;LI Chengbo(Department of Mechanics,College of Science,Xi'an University of Science and Technology,710600 Xi'an,China)

机构地区：[1]西安科技大学理学院力学系,西安710600

出　　处：《应用力学学报》2024年第6期1350-1358,共9页Chinese Journal of Applied Mechanics

基　　金：国家自然科学基金资助项目(No.11502197);陕西省科技厅资助项目(No.2018JM1030);中国留学基金委CSC资助项目(No.202008610039)。

摘　　要：纳米开关结构是纳米机电系统中的重要控制元件,基于表面能的模型引入表面效应,分析了表面效应和分子间作用力同时对纳米开关结构线性弯曲行为的影响。对应变能与表面能进行变分,并通过最小势能原理,推导出纳米开关的控制方程以及边界条件,并运用同伦摄动法来求解该非线性微分方程。通过计算结果具体分析了不同边界条件下纳米开关在考虑表面效应和Casimir力作用下表面效应对纳米开关弯曲变形、吸合电压的影响。研究结果表明,表面效应会使得纳米开关结构的弯曲变形更小,从而使得吸合电压变大,表面效应对纳米开关的吸合稳定性具有显著的影响。这对认识和研究纳米开关的力学行为,以及纳米开关的设计与制备有着重要的理论意义与实际使用价值。Nano-switch structure is an important control element in nano-electromechanical systems.Based on the surface energy model,the effects of surface effects and intermolecular forces on the linear bending behavior of nano-switch structures are analyzed respectively.Through the principle of minimum potential energy,the governing equation and boundary conditions of nanometer switch are derived,and the homo-topy perturbation method is used to solve the nonlinear differential equation.The effects of surface effect on the bending deformation and the voltage of nano-switch under the influence of Casimir and surface effect are analyzed.The results show that the surface effects reduce the deformation of the nano-switch structure,thus increasing the absorption voltage,and the surface effect has a significant impact on the stability of the nano-switch absorption.It is of great theoretical significance and practical value for understanding and studying the mechanical behavior of nano-switch,as well as the design and preparation of nano-switch.

关 键 词：表面效应 纳米开关 分子间作用力 弯曲变形 

分 类 号：TN303[电子电信—物理电子学]