Silicon thermo-optic phase shifters:a review of configurations and optimization strategies  

作　　者：Jorge Parra Juan Navarro-Arenas Pablo Sanchis 

机构地区：[1]Universitat Politècnica de València,Nanophotonics Technology Center,Valencia,Spain [2]Universidad de Valencia,Instituto de Ciencia de Materiales(ICMUV),Paterna,Spain

出　　处：《Advanced Photonics Nexus》2024年第4期1-17,共17页先进光子学通讯（英文）

基　　金：funding from MCIN/AEI/10.13039/501100011033(Grant Nos.PID2022-137787OB-I00 and TED2021-132211B-I00)and“ERDF:Away of making Europe”;The PROMETEO program(Grant No.CIPROM/2022/14)funded by Generalitat Valenciana is also acknowledged;J.Parra would like to acknowledge Universitat Politècnica de València(Grant No.PAID-10-23);J.Navarro acknowledges a grant from the University of Valencia/Ministry of Universities(Government of Spain),modality“Margarita Salas”(Grant No.MS21-037);funded by the European Union,Next-Generation EU.

摘　　要：Silicon photonics(SiPh)has emerged as the predominant platform across a wide range of integrated photonics applications,encompassing not only mainstream fields such as optical communications and microwave signal processing but also burgeoning areas such as artificial intelligence and quantum processing.A vital component in most SiPh applications is the optical phase shifter,which is essential for varying the phase of light with minimal optical loss.Historically,SiPh phase shifters have primarily utilized the thermo-optic coefficient of silicon for their operation.Thermo-optic phase shifters(TOPSs)offer significant advantages,including excellent compatibility with complementary metal-oxide-semiconductor technology and the potential for negligible optical loss,making them highly scalable.However,the inherent heating mechanism of TOPSs renders them power-hungry and slow,which is a drawback for many applications.We thoroughly examine the principal configurations and optimization strategies that have been proposed for achieving energy-efficient and fast TOPSs.Furthermore,we compare TOPSs with other electro-optic mechanisms and technologies poised to revolutionize phase shifter development on the SiPh platform.

关 键 词：thermo-optic coefficient phase shifter silicon photonics 

分 类 号：TN2[电子电信—物理电子学]