一种无附加运动二级缩小微动系统设计及性能分析  

DESIGN AND PERFORMANCE ANALYSIS OF A TWO-STAGE REDUCED MICRO-MOTION SYSTEM WITHOUT ADDITIONAL MOTION

作　　者：杨满芝[1] 李凯 冯斌[1] 韩飞燕 葛红玉 YANG ManZhi;LI Kai;FENG Bin;HAN FeiYan;GE HongYu(School of Mechanical Engineering,Xi'an University of Science and Technology,Xi'an 710054,China)

机构地区：[1]西安科技大学机械工程学院,西安710054

出　　处：《机械强度》2024年第6期1433-1440,共8页Journal of Mechanical Strength

基　　金：国家自然科学基金面上项目(52475537);西安市科技计划项目-科学家+工程师队伍建设项目(24KG-DW0029);陕西省教育厅服务地方专项项目(23JC050);陕西省创新能力支撑计划项目(2021TD-27);碑林区2024年科技计划项目(GX2434)资助。

摘　　要：为实现更小缩小比进而获得更高运动精度的灵活运动空间,设计了一种无附加运动的二级缩小微动机构及压电陶瓷致动器组成的微动系统,并对其驱动性能、运动性能和动态性能进行研究。基于柔性铰链杠杆原理及附加运动平衡原理,设计了一种无附加运动的二级缩小微动机构,可实现输入位移精密缩小;采用压电陶瓷致动器驱动二级缩小微动机构,组成二级缩小微动系统;采用有限元法完成系统驱动性能、运动性能及动态性能分析,实验法完成系统驱动性能及动态性能分析。分析结果显示,微动系统驱动具有线性度高、误差小等优点,系统具有优良的定位性能,系统动态性能良好且在运动过程中不会发生共振。研究对微动系统设计及性能分析具有重要的参考价值。In order to achieve a smaller reduction ratio and thus obtain a flexible motion space with higher motion precision,a micro-motion system composed of a two-stage reduction micro-motion mechanism without additional motion and a piezoelectric ceramic actuator was designed,and its driving performance,motion performance and dynamic performance were studied.Based on the principle of flexible hinge lever and the principle of additional motion balance,a two-stage reduction micro-motion mechanism without additional motion was designed,which could realise the precision reduction of input displacement;a piezoelectric ceramic actuator was used to drive the two-stage reduction micro-motion mechanism to form a two-stage reduction micro-motion system;the finite element method was used to complete the analysis of the system's driving performance,kinematic performance and dynamics,and the experimental method to complete the analysis of the system's driving performance and dynamics.The analysis results show that the micro-motion system drive has the advantages of high linearity,small error,etc.,the system has excellent positioning performance,the system dynamic performance is good and will not resonate in the movement process.The research has an important reference value for the design and performance analysis of the micromotion system.

关 键 词：微动系统 无附加运动 二级缩小 驱动性能 动态性能 

分 类 号：TH112[机械工程—机械设计及理论]