High-power,narrow linewidth solid-state deep ultraviolet laser generation at 193 nm by frequency mixing in LBO crystals  

作　　者：Zhitao Zhang Hanghang Yu Sheng Chen Zheng Li Xiaobo Heng Hongwen Xuan 

机构地区：[1]Chinese Academy of Sciences,GBA branch of Aerospace Information Research Institute,Guangzhou,China [2]University of Chinese Academy of Sciences,Beijing,China

出　　处：《Advanced Photonics Nexus》2024年第2期107-113,共7页先进光子学通讯（英文）

基　　金：supported by the Research Project of Aerospace Information Research Institute,Chinese Academy of Sciences (Grant Nos.E1Z1D101 and E2Z2D101);the Project of Chinese Academy of Sciences (Grant No.E33310030D);the Guangzhou Basic and Applied Basic Research Foundation (Grant Nos.2023A04J0336 and 2023A04J0021).

摘　　要：A 60-mW solid-state deep ultraviolet(DUV)laser at 193 nm with narrow linewidth is obtained with two stages of sum frequency generation in LBO crystals.The pump lasers,at 258 and 1553 nm,are derived from a homemade Yb-hybrid laser employing fourth-harmonic generation and Er-doped fiber laser,respectively.The Yb-hybrid laser,finally,is power scaling by a 2 mm×2 mm×30 mm Yb:YAG bulk crystal.Accompanied by the generated 220-mW DUV laser at 221 nm,the 193-nm laser delivers an average power of 60 mW with a pulse duration of 4.6 ns,a repetition rate of 6 kHz,and a linewidth of∼640 MHz.To the best of our knowledge,this is the highest power of 193-and 221-nm laser generated by an LBO crystal ever reported as well as the narrowest linewidth of 193-nm laser by it.Remarkably,the conversion efficiency reaches 27%for 221 to 193 nm and 3%for 258 to 193 nm,which are the highest efficiency values reported to date.We demonstrate the huge potential of LBO crystals for producing hundreds of milliwatt or even watt level 193-nm laser,which also paves a brand-new way to generate other DUV laser wavelengths.

关 键 词：193 nm solid-state laser deep ultraviolet LBO crystal sum frequency mixing narrow linewidth 

分 类 号：TN2[电子电信—物理电子学]