Cr掺杂对TiAlN涂层的择优取向和摩擦性能的影响机理  

Effect of Cr Doping on the Preferred Orientation and Frictional Properties of TiAlN Coatings

作　　者：张而耕 刘江 蔡远飞 梁丹丹 陈强 周琼 黄彪 ZHANG Ergeng;LIU Jiang;CAI Yuanfei;LIANG Dandan;CHEN Qiang;ZHOU Qiong;HUANG Biao(Shanghai Engineering Technology Research Center of Physical Vapor Deposition(PVD)Superhard Coatings and Equipment,Shanghai Institute of Technology,Shanghai 201418,China;School of Materials Science and Engineering,Tongji University,Shanghai 201804,China)

机构地区：[1]上海应用技术大学上海物理气相沉积(PVD)超硬涂层及装备工程技术研究中心,上海201418 [2]同济大学材料科学与工程学院,上海201804

出　　处：《材料导报》2024年第24期202-207,共6页Materials Reports

基　　金：上海市优秀技术带头人计划资助(22XD1434500);校协同创新项目(XTCX2022-24);引进人才科研经费(YJ2022-31);国家自然科学基金(51901138);上海市自然科学基金(20ZR1455700)。

摘　　要：为了改善TiAlN涂层力学性能和耐磨损性能,本工作利用阴极电弧技术在316 L不锈钢表面制备了不同Cr含量的TiAlCrN涂层,并探讨Cr掺杂对涂层的组织结构及力学性能的影响,揭示了涂层的摩擦磨损机理。结果表明:TiAlCrN涂层均呈立方结构且沿(200)、(111)、(220)、(311)晶面生长;随着Cr靶电流增加,涂层晶粒沿(111)晶面生长的织构系数增大,即Cr掺杂有利于涂层沿(111)晶面择优生长;TiAlCrN涂层的硬度和结合力均随Cr靶电流的升高而增大,Cr靶电流为150 A时,涂层表现出最大的硬度(25.50 GPa)和结合力(26.97 N);TiAlCrN涂层的摩擦系数及磨损率随Cr靶电流的增大而减小,Cr靶电流为150 A时,涂层表现出最低的摩擦系数(0.26)和磨损率(1.87×10^(-5)mm 3·N^(-1)·m^(-1));TiAlCrN涂层的主要磨损机理为磨粒、氧化及黏着磨损;对于高Cr靶电流制备的TiAlCrN涂层,其在摩擦磨损过程中具备较好润滑性的CrO_(x)优先于TiO_(x)、AlO_(x)形成,从而表现出低的磨损率;Cr掺杂能够有效改善TiAlN涂层在摩擦中的剥落现象,进一步提高涂层力学及摩擦磨损性能。To improve the mechanical properties and wear resistance of TiAlN coatings,TiAlCrN coatings with various Cr contents were deposited on 316 L stainless steel via cathodic arc technology.The effect of Cr doping on the microstructure and mechanical properties of the coatings was investigated,and the wear mechanism of the coatings was also revealed.The results showed that TiAlCrN coatings had cubic structure and grew along the(200),(111),(220),and(311)crystal planes.Besides,the texture coefficient of the grains along the(111)crystal plane increased with the Cr target current,namely,Cr doping could promote the optimal growth of the coating along(111)crystal surface.As the Cr target current raised,the hardness and bonding force of TiAlCrN coatings were enhanced,but the coefficient of friction and wear rate of TiAlCrN coatings were decreased.The coating with a Cr target current of 150 A showed the maximum hardness(25.50 GPa)and bonding force(26.97 N),as well as the lowest friction coefficient(0.26)and wear rate(1.87×10^(-5)mm 3·N^(-1)·m^(-1)).The main wear mechanisms of TiAlCrN coatings were abrasive,oxidative,and adhesive wear.Meanwhile,TiAlCrN coatings with high Cr target current exhibited a relatively low wear rate,because CrO_(x)with better lubrication properties,was preferentially formed over TiO_(x)and AlO_(x)during the friction wear process.Moreover,Cr doping could effectively ameliorate the spalling phenomenon,thus further strengthening the mechanical and friction wear performance of TiAlCrN coatings.

关 键 词：TiAlCrN涂层 CR掺杂 择优取向 力学性能 磨损 

分 类 号：TG174[金属学及工艺—金属表面处理]