Monolithically Integrated Photonic Structures for Stable On-Chip Solar Blind Communications  

作　　者：HE Rui HU Qiang RAN Junxue WANG Junxi WEI Tongbo 

机构地区：[1]Research and Development Center for Wide Bandgap Semiconduc-tors,Institute of Semiconductors,Chinese Academy of Sciences,Bei-jing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,Uni-versity of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《ZTE Communications》2024年第4期3-8,共6页中兴通讯技术（英文版）

基　　金：This work was financially supported by the Key Field R&D Program of Guangdong Province under Grant No.2021B0101300001;the National Key R&D Program of China under Grant No.2022YFB3605003;the Nation⁃al Natural Science Foundation of China under Grant Nos.52192614 and 62135013;Beijing Natural Science Foundation under Grant No.4222077;Beijing Science and Technology Plan under Grant No.Z221100002722019;Guangdong Basic and Applied Basic Research Foundation under Grant No.2022B1515120081.

摘　　要：A solar-blind multi-quantum well(MQW)structure wafer based on AlGaN materials is epitaxial growth by metal-organic chemical vapor deposition(MOCVD).The monolithically integrated photonic chips including light-emitting diodes(LEDs),waveguides,and photodetec-tors(PDs)are presented.The results of the finite-difference time-domain(FDTD)simulation confirm the strong light constraint of the wave-guide designed with the triangular structure in the optical coupling region.Furthermore,in virtue of predominant ultraviolet transverse mag-netic(TM)modes,the solar blind optical signal is more conducive to lateral transmission along the waveguide inside the integrated chip.The integrated PDs demonstrate sufficient photosensitivity to the optical signal from the integrated LEDs.When the LEDs are operated at 100 mA current,the photo-to-dark current ratio(PDCR)of the integrated PD is about seven orders of magnitude.The responsivity,specific detectivity,and external quantum efficiency of the integrated self-driven PD are 74.89 A/W,4.22×1013 Jones,and 3.38×104%,respectively.The stable on-chip optical information transmission capability of the monolithically integrated photonic chips confirms the great potential for application in large-scale on-chip optical communication in the future.

关 键 词：monolithically integration photonic chips UVC solar-blind communication 

分 类 号：TN25[电子电信—物理电子学] TN40