白光共焦法全曲面粗糙度检测技术  

Full surface roughness detection method by white light confocal method

作　　者：孟文俊 林波[1] 聂箫 李宗亮[1] 刘鹏程 黄川 MENG Wenjun;LIN Bo;NIE Xiao;LI Zongliang;LIU Pengcheng;HUANG Chuan(Institute of Materials,China Academy of Engineering Physics,Jiangyou Sichuan 621907,China)

机构地区：[1]中国工程物理研究院材料研究所,四川江油621907

出　　处：《激光杂志》2024年第11期55-58,共4页Laser Journal

摘　　要：为了解决内曲面粗糙度测量问题,实现曲面类零件全曲面粗糙度的测量,提出一种白光共焦法全曲面粗糙度检测方法。基于白光共焦传感器,搭建测量系统,设计了工件装夹结构、被测表面定位结构、传感器聚焦等结构,并在C#平台上开发了软件系统,建立了曲面类零件全曲面粗糙度测量能力。对标标准多刻线样板和曲面类样品,开展了多项考核验证实验,实验结果表明:该测量系统具有较高的示值准确性、示值重复性、示值稳定性,具备曲面类零件全曲面粗糙度测量的能力。In order to solve problem of measuring the inner surface roughness and realize the full surface roughness measurement,a white light confocal method for measuring the full surface roughness is proposed.Based on the white light confocal sensor,the measurement system is built,and the workpiece clamping structure,the measured surface positioning structure,the sensor focusing structure and other structure are designed.The software system is developed on the C#platform,and the full surface roughness measurement ability is estabished.Verification experiments have been carried out on the standard multi-scribed template and curved surface samples.The experimental results show that the measuerment system has high indication accuracy,repeatability and stability,and has the ability to measure the full surface roughness of curved surface parts.

关 键 词：曲面类零件 表面粗糙度 非接触测量 光谱共焦 

分 类 号：TN249[电子电信—物理电子学]