新型空心电极辉光离子源的供电控制系统设计及应用  

Design and Application of Power Supply Control System of New Hollow Electrode Glow Ion Source

作　　者：万英奇 任敏 詹陈锐 王占扩[1] 陈吉文 WAN Ying-qi;REN Min;ZHAN Chen-rui;WANG Zhan-kuo;CHEN Ji-wen(College of Electrical and Control engineering,North China University of Technology,Beijing 100144,China)

机构地区：[1]北方工业大学电气与控制工程学院,北京100144

出　　处：《分析测试学报》2024年第12期1979-1985,共7页Journal of Instrumental Analysis

基　　金：广东省重点研发项目(2022B0303030003)。

摘　　要：离子源作为质谱仪的核心部件,对实现痕量检测有着至关重要的作用。供电系统作为离子源的重要组成部分,直接影响离子源的稳定性、效率和性能。基于实验室自研的新型空心电极辉光离子源,该文提出了一种基于先进精简指令集器件(ARM)高精度数字控制的辉光离子源供电系统。该系统具备多电极片电源动态设置功能,并能实时监测电源输出,通过与离子源的电离腔体结合,实现了离子的激发,并能够调节离子源的电源电压,以满足对离子激发的需求,提升仪器的灵敏度。实验室自研辉光实验平台的验证结果显示,该离子源供电系统设计合理,电压输出稳定可控,满足质谱仪对离子源电离电压的需求。Ion source,as a core component of mass spectrometer,plays a crucial role in realizing trace detection.The power supply system,as an important part of the ion source,directly affects the stability,efficiency and performance of the ion source.Based on the new hollow electrode glow ion source researched by the laboratory,this paper proposes a glow ion source power supply system based on advanced RISC machines(ARM) high-precision digital control.The system has the function of dynamic setting of power supply for multiple electrode plates and real-time monitoring of power supply output.By combining with the ionization cavity of the ion source,the system realizes the excitation of ions and is able to adjust the power supply voltage of the ion source to meet the demand for excitation of ions,so as to enhance the sensitivity of the instrument.It is verified by the self-developed glow experimental platform in the laboratory that the ion source power supply system is reasonably designed,and the voltage output is stable and controllable,which meets the requirements of the mass spectrometer for the ionization voltage of the ion source.

关 键 词：辉光离子源 供电系统 高精度 数字控制 

分 类 号：O657.3[理学—分析化学] O657.6[理学—化学]