半导体设备SECS/GEM通信研究与设计  

Research and Design of SECS/GEM Communication for Semiconductor Equipment

作　　者：周水清 罗超 何永平 ZHOU Shui-qing;LUO Chao;HE Yong-ping(The 48th Research Institute of CETC)

机构地区：[1]中国电子科技集团公司第四十八研究所

出　　处：《中国集成电路》2024年第11期69-73,共5页China lntegrated Circuit

摘　　要：SECS/GEM是半导体行业中广泛采用的一个半导体设备通信标准。本文首先介绍了SECS/GEM标准的制定及行业应用情况,分别说明了HSMS、SECS-II、GEM各个通信标准的数据格式、传输控制、状态转换模型控制方式等;同时,阐述了所设计一套用于半导体设备SECS/GEM标准的软件通信系统。通过实践表明,该通信系统符合SECS/GEM标准,性能良好,满足设备的需求。SECS/GEM is a widely adopted communication standard in the semiconductor industry.This article first introduces the development and industrial applications of the SECS/GEM standard,explaining the data formats,transmission control,and state transition model control methods of the various communication standards including HSMS,SECS-II,and GEM.A software communication system for semiconductor equipment based on SECS/GEM has been designed.Practical applications have demonstrated that this communication system conforms to the SECS/GEM standard,exhibits good performance,and meets the requirements of the equipment.

关 键 词：半导体设备 SECS/GEM 通信接口 设备控制 

分 类 号：TN40[电子电信—微电子学与固体电子学] TN91