Centimeter scale color printing with grayscale lithography  

作　　者：Yu Chen Yang Li Wenhao Tang Yutao Tang Yue Hu Zixian Hu Junhong Deng Kokwai Cheah Guixin Li 

机构地区：[1]Southern University of Science and Technology,Department of Materials Science and Engineering,Shenzhen,China [2]Southern University of Science and Technology,Shenzhen Institute for Quantum Science and Engineering,Shenzhen,China [3]Hong Kong Baptist University,Department of Physics and Institute of Advanced Materials,Hong Kong,China

出　　处：《Advanced Photonics Nexus》2022年第2期30-35,共6页先进光子学通讯（英文）

基　　金：supported by National Natural Science Foundation of China(91950114,12161141010);Zhangjiang Laboratory,Guangdong Provincial Innovation and Entrepreneurship Project(2017ZT07C071);Natural Science Foundation of Shenzhen Innovation Commission(JCYJ20200109140808088);K.C.would like to thank the support from Hong Kong Research Grant Council AoE/P-02/12 and 12303019.

摘　　要：Structural color from artificial structures,due to its environmental friendliness and excellent durability,represents a route for color printing applications.Among various physical mechanisms,the Fabry–Perot(F–P)cavity effect provides a powerful way to generate vivid colors in either the reflection or transmission direction.Most of the previous F–P type color printing works rely on electron beam grayscale lithography,however,with this technique it is challenging to make large-area and low-cost devices.To circumvent this constraint,we propose to fabricate the F–P type color printing device by the laser grayscale lithography process.The F–P cavity consists of two thin silver films as mirrors and a photoresist film with a spatially variant thickness as the spacer layer.By controlling the laser exposure dose pixel by pixel,a centimeter-scale fullcolor printing device with a spatial resolution up to 5μm×5μm is demonstrated.The proposed large area color printing device may have great potential in practical application areas such as color displays,hyperspectral imaging,advanced painting,and so on.

关 键 词：structural color laser grayscale lithography Fabry-Perot cavity 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]