电子级氟氮混合气的制备研究  

Study on the preparation of electronic grade fluorine nitrogen mixture

作　　者：杨坤 YANG Kun(Fujian Yongjing Technology Co.,Ltd.,Nanping 354000,China)

机构地区：[1]福建永晶科技股份有限公司,福建南平354000

出　　处：《生态产业科学与磷氟工程》2024年第11期50-54,共5页Eco-industry Science & Phosphorus Fluorine Engineering

摘　　要：电子级氟氮混合气是精细化工领域的重要原料,广泛应用于含氟电子特气、半导体、医药等领域。目前国内电子级氟氮混合气生产厂家较少,其主要原因是受限于氟气的提纯技术。笔者从工艺角度探讨电子级氟氮混合气的制备,即电子级氟混合气将装配有无水氢氟酸的电解槽电解反应产生粗制氟气,经过一系列工艺处理,除掉含量较高的氟化氢等杂质,再经精密除尘去除细小粉尘,使其纯化成为电子级氟气,得到质量分数达到99.9%以上的电子级氟气。进一步将电子级氟气通过分压法与高纯氮气混配,最终得到电子级氟氮混合气。Electronic grade fluorine nitrogen mixture is an important raw material in the field of fine chemical industry,which is widely used in fluorine electronic special gas,semiconductor,medicine and other fields.However,at present,the domestic electronic grade fluorine nitrogen mixture manufacturers are less,the main reason is limited by the purification technology of fluorine gas.The production process of electronic grade fluorine nitrogen mixture from the perspective of technology is discussed,that is,the electronic grade fluorine mixture is equipped with an electrolytic cell with or without hydrofluoric acid to produce crude fluorine gas.After a series of process treatment,impurities such as high content hydrogen fluoride are removed,and fine dust is removed by precision dust removal,so that it is purified into electronic grade fluorine gas.Electronic grade fluorine gas with fluorine content of more than 99.9%is obtained.Electron grade fluorine is further mixed with high purity nitrogen by partial pressure method to obtain electron grade fluorine nitrogen mixture.

关 键 词：电子级氟氮混合气 制氟 氟气提纯工艺 半导体 

分 类 号：TQ124[化学工程—无机化工]