局部掺杂选择性发射极对太阳电池电性能的影响  

Effect of Locally Doped Selective Emitters on the Electrical Performance of Solar Cells

作　　者：陈丹 屈小勇 高嘉庆 吴翔 王永冈 石惠君 CHEN Dan;QU Xiaoyong;GAO Jiaqing;WU Xiang;WANG Yonggang;SHI Huijun(Solar Cell and Module R&D Laboratory,Qinghai Huanghe Hydropower Development Co.,Ltd.,Xining 810007,China;Xi’an Solar Electric Power Branch,Qinghai Huanghe Hydropower Development Co.,Ltd.,Xi’an 710100,China;Xining Solar Electric Power Branch,Qinghai Huanghe Hydropower Development Co.,Ltd.,Xining 810001,China)

机构地区：[1]青海黄河上游水电开发有限责任公司太阳能电池及组件研发实验室,西宁810007 [2]青海黄河上游水电开发有限责任公司西安太阳能电力分公司,西安710100 [3]青海黄河上游水电开发有限责任公司西宁太阳能电力分公司,西宁810001

出　　处：《材料导报》2024年第S02期11-14,共4页Materials Reports

基　　金：青海黄河上游水电开发有限责任公司“P型隧穿氧化钝化接触结构激光掺杂及钝化技术研究”科研项目。

摘　　要：借助激光重掺杂技术进行IBC电池选择性发射极的制备。对n型硅片进行高温沉积后制备出双面轻掺杂发射极区域,通过改变激光功率和速度形成双面对称重掺杂选择性发射极(p++)区域并且匹配最佳退火温度,测试分析掺杂前后的方块电阻、掺杂浓度、退火后方块电阻大小、隐开路电压值和光致发光(PL)测试确定出最佳工艺参数;使用最佳的工艺参数制备出重掺杂发射极IBC电池对比产线工艺,测试分析其对电池电性能的影响。研究结果表明:激光功率为50 W、速度为14500 mm/s时,p+区掺杂浓度为8×10^(20) cm^(-3)。在760℃的退火温度下,四组激光参数下的电池均具有较优的钝化效果且激光功率为50 W时隐开路电压达到了734 mV。选择性发射极重掺杂后电池最高转换效率可达到25.6%,平均转换效率为24.8%,转换效率为24.8%~24.9%的电池片数量最多。对应参数下的短路电流、开路电压以及填充因子均值分别为11.453 A、0.721 V和82.44%。The selective emitter of IBC cell was prepared by laser heavy doping technique.After high-temperature deposition of n-type silicon wafer,double-sided lightly doped emitter regions were prepared.By changing the laser power and speed,a double-sided symmetric heavily doped selective emitter(p++)region was formed and matched with the optimal annealing temperature.The optimal process parameters were determined by testing and analyzing the block resistance before and after doping,doping concentration,block resistance size after annealing,hidden open circuit voltage value,and PL testing.The heavily doped emitter IBC cell was prepared with the best process parameters,and the influence on the electrical performance of the cell was tested and analyzed.The results show that with the laser power of 50 W and the speed of 14500 mm/s,the doping concentration of p+region is 8×10^(20) cm^(-3).At the annealing temperature of 760℃,the four sets of laser parameters had better passivation effect and the hidden open circuit voltage reached 734 mV when the laser power was 50 W.After selective emission pole heavy doping,the highest conversion efficiency of the cell can reach 25.6%,the average conversion efficiency was 24.8%,and the number of cells with the conversion efficiency of 24.8%-24.9%was the largest.The mean values of short circuit current,open circuit voltage and filling factor under the corresponding parameters are 11.453 A,0.721 V and 82.44%,respectively.

关 键 词：IBC电池 选择性发射极 激光掺杂 表面浓度 转化效率 

分 类 号：TK514[动力工程及工程热物理—热能工程]