Surface-patterned chalcogenide glasses with high-aspect-ratio microstructures for long-wave infrared metalenses  

作　　者：Zhaofeng Gu Yixiao Gao Kongsi Zhou Junyang Ge Chen Xu Lei Xu Mohsen Rahmani Ran Jiang Yimin Chen Zijun Liu Chenjie Gu Yaoguang Ma Jianrong Qiu Xiang Shen 

机构地区：[1]Laboratory of Infrared Materials and Devices,Research Institute of Advanced Technologies,Ningbo University,Ningbo 315211,China [2]Zhejiang Key Laboratory of Advanced Optical Functional Materials and Devices,Ningbo 315211,China [3]Advanced Optics&Photonics Laboratory,Department of Engineering,School of Science and Technology,Nottingham Trent University,Nottingham NG118NS,United Kingdom [4]Faculty of Electrical Engineering and Computer Science,Ningbo University,Ningbo 315211,China [5]State Key Laboratory of Extreme Photonics and Instrumentation,College of Optical Science and Engineering,International Research,Center for Advanced Photonics,Zhejiang University,Hangzhou 310027,China [6]Ningbo Institute of Oceanography,Ningbo 315832,China

出　　处：《Opto-Electronic Science》2024年第10期1-13,共13页光电科学（英文）

基　　金：supported by National Natural Science Foundation of China(Grant No.62105172);Natural Science Foundation of Zhejiang Province(Grant No.LDT23F05015F05,LDT23F05011F05).

摘　　要：Multidimensional-engineering chalcogenide glasses is widely explored to construct various infrared photonic devices,with their surface as a key dimension for wavefront control.Here,we demonstrate direct patterning high-aspect-ratio microstructures on the surface of chalcogenide glasses offers an efficient and robust method to manipulate longwave infrared radiations.Despite chalcogenide glass being considered soft in terms of its mechanical properties,we successfully fabricate high-aspect-ratio micropillars with a height of 8μm using optimized deep etching process,and we demonstrate a 2-mm-diameter all-chalcogenide metalens with a numerical aperture of 0.45 on the surface of a 1.5-mm-thick As2Se3 glass.Leveraging the exceptional longwave infrared(LWIR)transparency and moderate refractive index of As2Se3 glass,the all-chalcogenide metalens produces a focal spot size of~1.39λ0 with a focusing efficiency of 47%at the wavelength of 9.78μm,while also exhibiting high-resolution imaging capabilities.Our work provides a promising route to realize easy-to-fabricate,mass-producible planar infrared optics for compact,light-weight LWIR imaging systems.

关 键 词：chalcogenide glasses long wave infrared metalens 

分 类 号：TQ171.1[化学工程—玻璃工业]